Patents by Inventor Aaron Shoe

Aaron Shoe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for recycling alkane immersion liquids and methods of employment
    Publication number: 20070182896
    Abstract: The present invention provides a clean closed loop fluid transport system and methods for recycling low absorbance liquid alkanes. The alkanes can be advantageously employed as immersion liquids in the production of electronic or integrated optical circuit elements by photolithographic methods employing ultraviolet wavelengths.
    Type: Application
    Filed: September 9, 2006
    Publication date: August 9, 2007
    Inventors: Douglas Adelman, Roger French, Michael Lemon, Sheng Peng, Aaron Shoe, Robert Wheland