Patents by Inventor Aaron Zanetto

Aaron Zanetto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer plate and mask arrangement for substrate fabrication
    Patent number: 10679883
    Abstract: A system for processing wafers in a vacuum processing chamber. Carrier comprising a frame having a plurality of openings, each opening configured to accommodate one wafer. A transport mechanism configured to transport the plurality of carriers throughout the system. A plurality of wafer plates configured for supporting wafers. An attachment mechanism for attaching a plurality of wafer plates to each of the carriers, wherein each of the wafer plates is attached to a corresponding position at an underside of a corresponding carrier, such that each of the wafers positioned on one of the wafer carriers is positioned within one of the plurality of opening in the carrier. Mask attached over front side of one of the plurality of opening in the carrier. Alignment stage supports wafer plate under the opening in the carrier. A camera positioned to simultaneously image the mask and the wafer.
    Type: Grant
    Filed: October 3, 2016
    Date of Patent: June 9, 2020
    Assignee: INTEVAC, INC.
    Inventors: Terry Bluck, Aaron Zanetto, William Eugene Runstadler, Jr., Terry Pederson
  • WAFER PLATE AND MASK ARRANGEMENT FOR SUBSTRATE FABRICATION
    Publication number: 20170062258
    Abstract: A system for processing wafers in a vacuum processing chamber. Carrier comprising a frame having a plurality of openings, each opening configured to accommodate one wafer. A transport mechanism configured to transport the plurality of carriers throughout the system. A plurality of wafer plates configured for supporting wafers. An attachment mechanism for attaching a plurality of wafer plates to each of the carriers, wherein each of the wafer plates is attached to a corresponding position at an underside of a corresponding carrier, such that each of the wafers positioned on one of the wafer carriers is positioned within one of the plurality of opening in the carrier. Mask attached over front side of one of the plurality of opening in the carrier. Alignment stage supports wafer plate under the opening in the carrier. A camera positioned to simultaneously image the mask and the wafer.
    Type: Application
    Filed: October 3, 2016
    Publication date: March 2, 2017
    Inventors: Terry Bluck, Aaron Zanetto, William Eugene Runstadler, JR., Terry Pederson