Patents by Inventor Aart Johannes Mateboer

Aart Johannes Mateboer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Six degree of freedom (DOF) actuator reaction mass
    Patent number: 7885021
    Abstract: In one embodiment, an actuator for positioning of mirrors in an optical system is provided and includes an actuator base and a reaction mass assembly. The reaction mass assembly includes a reaction mass support member having biasing features formed as a part thereof and a reaction mass that is coupled to the biasing features such that the reaction mass is suspended on biasing elements in six degrees of freedom (DOF). The support member is fixedly connected to the actuator base; however, the reaction mass is not directly attached to the actuator base but rather is supported in the reaction mass support member in a manner that allows it to have six DOF.
    Type: Grant
    Filed: March 27, 2008
    Date of Patent: February 8, 2011
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Frans H. van Deuren, Hendrick Dirk Visser, Bernard Stommen, Jeroen van Aert, Aart Johannes Mateboer
  • SIX DEGREE OF FREEDOM (DOF) ACTUATOR REACTION MASS
    Publication number: 20090040638
    Abstract: In one embodiment, an actuator for positioning of mirrors in an optical system is provided and includes an actuator base and a reaction mass assembly. The reaction mass assembly includes a reaction mass support member having biasing features formed as a part thereof and a reaction mass that is coupled to the biasing features such that the reaction mass is suspended on biasing elements in six degrees of freedom (DOF). The support member is fixedly connected to the actuator base; however, the reaction mass is not directly attached to the actuator base but rather is supported in the reaction mass support member in a manner that allows it to have six DOF.
    Type: Application
    Filed: March 27, 2008
    Publication date: February 12, 2009
    Applicant: Carl Zeiss SMT AG
    Inventors: Frans H. van Deuren, Hendrick Dirk Visser, Bernard Stommen, Jeroen van Aert, Aart Johannes Mateboer