Patents by Inventor Abdalmohsen Elmalk

Abdalmohsen Elmalk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for determining stack configuration of substrate
    Patent number: 11281113
    Abstract: A method for determining a stack configuration for a substrate subjected to a patterning process. The method includes obtaining (i) measurement data of a stack configuration with location information on a printed substrate, (ii) a substrate model configured to predict a stack characteristic based on a location of the substrate, and (iii) a stack map including a plurality of stack configurations based on the substrate model. The method iteratively determines values of model parameters of the substrate model based on a fitting between the measurement data and the plurality of stack configurations of the stack map, and predicts an optimum stack configuration at a particular location based on the substrate model using the values of the model parameters.
    Type: Grant
    Filed: May 21, 2019
    Date of Patent: March 22, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Danying Li, Chi-Hsiang Fan, Abdalmohsen Elmalk, Youping Zhang, Jay Jianhui Chen, Kui-Jun Huang