Patents by Inventor Abdelhamid Kechroud

Abdelhamid Kechroud has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 10114300
    Abstract: An electromagnetic actuator includes a coil assembly including a coil; a magnet assembly including a first and a second magnet unit, each magnet unit including a magnetic yoke and a plurality of permanent magnets mounted to the magnetic yoke, the first and second magnet unit forming a magnetic circuit for receiving the coil assembly and, upon energizing the coil, generating a force in a first direction; and a holder for holding the magnet units, wherein a weight ratio of the magnet assembly over the coil assembly is smaller than the weight ratio of the magnet assembly over the coil assembly when the ratio of force over electrical power is maximized.
    Type: Grant
    Filed: August 15, 2013
    Date of Patent: October 30, 2018
    Assignee: ASML Netherlands B.V.
    Inventors: Henrikus Herman Marie Cox, Mark Marcus Gerardus Heeren, Peter Michel Silvester Maria Heijmans, Jacob Jan Velten, Johannes Hubertus Antonius Van De Rijdt, Godfried Katharina Hubertus Franciscus Geelen, Abdelhamid Kechroud
  • Lithographic apparatus and lorentz actuator
    Patent number: 9293951
    Abstract: A lithographic apparatus includes an actuator for producing a force in a first direction between a first and a second part including a first magnet assembly and a second magnet assembly each attached opposite to each other to the first part of the apparatus, the first magnet assembly including a first main magnet system and a first outer subsidiary magnet system, and the second magnet assembly including a second main magnet system and a second outer subsidiary magnet system, the first and second main magnet system defining a space between them in a second direction perpendicular to the first direction. The actuator includes a coil attached to the second part. The distance between the first outer subsidiary magnet system and the second outer subsidiary magnet system in the second direction is substantially zero.
    Type: Grant
    Filed: January 9, 2013
    Date of Patent: March 22, 2016
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Fidelus Adrianus Boon, Hendrikus Pascal Gerardus Johannes Van Agtmaal, Abdelhamid Kechroud, Sven Antoin Johan Hol, Peter Michel Silvester Maria Heijmans
  • LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20150212435
    Abstract: An electromagnetic actuator includes a coil assembly including a coil; a magnet assembly including a first and a second magnet unit, each magnet unit including a magnetic yoke and a plurality of permanent magnets mounted to the magnetic yoke, the first and second magnet unit forming a magnetic circuit for receiving the coil assembly and, upon energizing the coil, generating a force in a first direction; and a holder for holding the magnet units, wherein a weight ratio of the magnet assembly over the coil assembly is smaller than the weight ratio of the magnet assembly over the coil assembly when the ratio of force over electrical power is maximized.
    Type: Application
    Filed: August 15, 2013
    Publication date: July 30, 2015
    Applicant: ASML Netherlands B.V,
    Inventors: Henrikus Herman Marie Cox, Mark Marcus Gerardus Heeren, Peter Michel Silvester Mar Heijmans, Jacob Jan Velten, Johannes Hubertus Antonius Van De Rijdt, Godfried Katharina Hubertus Franciscu Geelen, Abdelhamid Kechroud
  • LITHOGRAPHIC APPARATUS AND LORENTZ ACTUATOR
    Publication number: 20130175884
    Abstract: A lithographic apparatus includes an actuator for producing a force in a first direction between a first and a second part including a first magnet assembly and a second magnet assembly each attached opposite to each other to the first part of the apparatus, the first magnet assembly including a first main magnet system and a first outer subsidiary magnet system, and the second magnet assembly including a second main magnet system and a second outer subsidiary magnet system, the first and second main magnet system defining a space between them in a second direction perpendicular to the first direction. The actuator includes a coil attached to the second part. The distance between the first outer subsidiary magnet system and the second outer subsidiary magnet system in the second direction is substantially zero.
    Type: Application
    Filed: January 9, 2013
    Publication date: July 11, 2013
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Fidelus Adrianus Boon, Hendrikus Pascal Gerardus Johannes Van Agtmaal, Abdelhamid Kechroud, Sven Antoin Johan Hol, Peter Michel Silvester Maria Heijmans