Abstract: The invention relates to a micro cantilever beam sensor and making method, including a chip, and its character: there is at least a group of sensor cells set on the chip, where the sensor cell is composed of the completely same four force-sensitive resistors composing a Wheatstone bridge and two cantilever beams, two of these resistors are on the substrate of the chip, the other two are on the two cantilever beams, respectively, one cantilever beam acts on a measuring cantilever beam and the other one acts on a reference cantilever beam, and the measuring cantilever beam is set with a sensitive layer on the surface. It can design and prepare in a liquid-flow micro-tank by front etching and silicon-glass bonding techniques, to directly detect liquid biomolecule. Whether applied to gas sensor or biosensor, it will play an important role in reducing device size, enhancing device sensitivity and realizing sensor multi-functionality.

Abstract: The invention relates to a micro cantilever beam sensor and making method, including a chip, and its character: there is at least a group of sensor cells set on the chip, where the sensor cell is composed of the completely same four force-sensitive resistors composing a Wheatstone bridge and two cantilever beams, two of these resistors are on the substrate of the chip, the other two are on the two cantilever beams, respectively, one cantilever beam acts on a measuring cantilever beam and the other one acts on a reference cantilever beam, and the measuring cantilever beam is set with a sensitive layer on the surface. It can design and prepare in a liquid-flow micro-tank by front etching and silicon-glass bonding techniques, to directly detect liquid biomolecule. Whether applied to gas sensor or biosensor, it will play an important role in reducing device size, enhancing device sensitivity and realizing sensor multi-functionality.

Abstract: A microcantilever based photoacoustic sensor is generally provided. In one embodiment, the microcantilever includes: a substrate; a GaN layer on the substrate, wherein the GaN layer defines a cantilever extending beyond an edge of the substrate, with a base area of the cantilever defined by the area spanning the edge of the substrate; a heterojunction field effect transistor (HFET) deflection transducer positioned on the cantilever; a pair of electrical contacts, each electrically connected to the HFET deflection transducer; and a microfluidic channel in fluid communication with an analyte reservoir, wherein the analyte reservoir is positioned at the base of the cantilever. A sensing system is also generally provided.