Patents by Inventor Abhay Dubey

Abhay Dubey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for determining on-chip sheet resistivity
    Patent number: 6403389
    Abstract: A method measures a resistance in a test structure to determine the sheet resistivity of a test structure. In one embodiment, a family of test structures is provided to determine the effective sheet resistivity of a conductor as a function of its width. The method is applicable to conductors in manufacturing processes in which “slots” or “islands” are created in the conductor to prevent dishing during chemical-mechanical polishing.
    Type: Grant
    Filed: August 12, 1999
    Date of Patent: June 11, 2002
    Assignee: Sequence Design, Inc.
    Inventors: Keh-Jeng Chang, Robert G. Mathews, Shih-tsun A. Chou, Abhay Dubey