Patents by Inventor Abhijit Desai
Abhijit Desai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 8523639Abstract: Embodiments of the invention provide a slurry delivery and rinse system for a chemical mechanical polishing (CMP) apparatus which is capable of self-cleaning, and which can adjustably deliver the slurry agent and rinse agent over a polishing pad. In one embodiment, the fluid delivery system has a distributed slurry delivery arm (DSDA) which contains at least one manifold, usually two or more manifolds attached to the lower surface of the delivery arm. Each DSDA manifold contains a plurality of slurry nozzles disposed along the length of the manifold. The delivery arm also contains a plurality of high pressure rinse nozzles extending from the lower surface of the delivery arm and disposed along the length of the delivery arm, parallel to each DSDA manifold. In one example, the delivery arm contains two DSDA manifolds disposed parallel to each other and a plurality of high pressure rinse nozzles disposed between the manifolds.Type: GrantFiled: October 23, 2009Date of Patent: September 3, 2013Assignee: Applied Materials, Inc.Inventors: Jamie Stuart Leighton, Abhijit Desai, Douglas R. McAllister
-
Publication number: 20100112917Abstract: Embodiments of the invention provide a slurry delivery and rinse system for a chemical mechanical polishing (CMP) apparatus which is capable of self-cleaning, and which can adjustably deliver the slurry agent and rinse agent over a polishing pad. In one embodiment, the fluid delivery system has a distributed slurry delivery arm (DSDA) which contains at least one manifold, usually two or more manifolds attached to the lower surface of the delivery arm. Each DSDA manifold contains a plurality of slurry nozzles disposed along the length of the manifold. The delivery arm also contains a plurality of high pressure rinse nozzles extending from the lower surface of the delivery arm and disposed along the length of the delivery arm, parallel to each DSDA manifold. In one example, the delivery arm contains two DSDA manifolds disposed parallel to each other and a plurality of high pressure rinse nozzles disposed between the manifolds.Type: ApplicationFiled: October 23, 2009Publication date: May 6, 2010Applicant: APPLIED MATERIALS, INC.Inventors: JAMIE STUART LEIGHTON, Abhijit Desai, Douglas R. McAllister
-
Publication number: 20080190364Abstract: A substrate support assembly supports a substrate in a process zone of a process chamber. The substrate support assembly has a support block having an electrode and an arm to hold the support block in the process chamber, the arm having a channel therethrough. The arm has a first clamp to attach to the support block and a second clamp to attach to a chamber component. A silicon cover lock comprising an annular disc shaped and sized to seat in the arm beneath the first clamp to cover and seal off the electrical conductors from the chamber environment.Type: ApplicationFiled: February 13, 2007Publication date: August 14, 2008Inventors: Christopher Richard Mahon, Abhijit Desai, Robert T. Hirahara
-
Publication number: 20080000530Abstract: A gas flow comparator comprises a gas control mounted on a gas tube to set a gas flow or pressure of a gas passing thorough the gas tube. A principal flow splitter comprises an inlet port connected to the gas tube. First and second flow restrictors are connected to the principal flow splitter. A pair of secondary flow splitters are each connected to a restrictor outlet of a flow restrictor. A differential pressure gauge is connected to the secondary flow splitters. A pair of nozzle holders are connected to the secondary flow splitters and are capable of being connected to first and second nozzles. In operation, the pressure differential gauge registers a pressure differential proportional to a variation in the passage of gas through the first and second nozzles.Type: ApplicationFiled: May 25, 2007Publication date: January 3, 2008Inventors: DAVID P. SUN, Daniel J. Coffman, Sophia M. Velastegui, Steven E. Gianoulakis, Abhijit Desai
-
Patent number: 7147359Abstract: A lamp assembly for a substrate processing chamber is described. The lamp assembly comprises a tubular body having first and second ends, a lamp element at least partially seated in the first end having a filament and first electrical connectors, transmission wires attached to the first electrical connectors, and a rigid plug flexibly positioned relative to the second end of the tubular body having second electrical connectors attached to the transmission wires. The flexibly positioned rigid plug is generally capable of a range movement in directions both perpendicular and parallel to a longitudinal axis of the tubular body. In one version, the rigid plug comprises first and second plug elements.Type: GrantFiled: June 25, 2004Date of Patent: December 12, 2006Assignee: Applied Materials, Inc.Inventors: Joseph M. Ranish, Abhijit Desai, Apollo Havelind
-
Patent number: 7045014Abstract: A substrate support assembly supports a substrate in a process chamber. The substrate support assembly has a support block having an electrode and an arm to hold the support block in the process chamber, the arm having a channel therethrough. The arm has a first clamp to attach to the support block and a second clamp to attach to the process chamber. A plurality of electrical conductors pass through the channel of the arm, and a ceramic insulator is between the conductors.Type: GrantFiled: April 24, 2003Date of Patent: May 16, 2006Assignee: Applied Materials, Inc.Inventors: Christopher Richard Mahon, Abhijit Desai
-
Publication number: 20060005767Abstract: A substrate retaining clamp for a substrate processing chamber has a ring having an annular portion that surrounds a substrate in the chamber. The ring also has an overhang ledge to cover a periphery of the substrate. The retaining clamp has a knurled exposed surface of the overhang ledge that has spaced apart knurled ridges and furrows. In one version, the knurled ridges and furrows are concentric and radially spaced apart. The knurled exposed surface having the knurled ridges and furrows provides improved performance in the processing of substrates, and especially in high temperature processes.Type: ApplicationFiled: June 28, 2004Publication date: January 12, 2006Inventors: Kenneth Tsai, Abhijit Desai
-
Publication number: 20050286243Abstract: A lamp assembly for a substrate processing chamber is described. The lamp assembly comprises a tubular body having first and second ends, a lamp element at least partially seated in the first end having a filament and first electrical connectors, transmission wires attached to the first electrical connectors, and a rigid plug flexibly positioned relative to the second end of the tubular body having second electrical connectors attached to the transmission wires. The flexibly positioned rigid plug is generally capable of a range movement in directions both perpendicular and parallel to a longitudinal axis of the tubular body. In one version, the rigid plug comprises first and second plug elements.Type: ApplicationFiled: June 25, 2004Publication date: December 29, 2005Inventors: Joseph Ranish, Abhijit Desai, Apollo Havelind
-
Publication number: 20050284372Abstract: A substrate processing chamber component is capable of being exposed to an energized gas in a process chamber. The component has an underlying component structure and a surface on the underlying structure. The surface has a plurality of concentric grooves that are radially spaced apart across the surface, and electron beam textured depressions formed between adjacent grooves on the surface. The process residues adhere to the surface to reduce the contamination of processed substrates.Type: ApplicationFiled: November 16, 2004Publication date: December 29, 2005Inventors: Laxman Murugesh, Abhijit Desai
-
Publication number: 20040226514Abstract: A substrate support assembly supports a substrate in a process chamber. The substrate support assembly has a support block having an electrode and an arm to hold the support block in the process chamber, the arm having a channel therethrough. The arm has a first clamp to attach to the support block and a second clamp to attach to the process chamber. A plurality of electrical conductors pass through the channel of the arm, and a ceramic insulator is between the conductors.Type: ApplicationFiled: April 24, 2003Publication date: November 18, 2004Applicant: Applied Materials, Inc.Inventors: Christopher Richard Mahon, Abhijit Desai