Abstract: Methods for etching a bottom anti-reflective coating (BARC) and/or an anti-reflective coating (ARC) and/or a dielectric anti-reflective coating (DARC) to form high aspect ratio features using an etch process are provided. The methods described herein advantageously facilitate profile and dimension control of features with high aspect ratios through a proper sidewall and bottom management scheme during the bottom anti-reflective coating (BARC) and/or an anti-reflective coating (ARC) and/or a dielectric anti-reflective coating (DARC) open process.

Abstract: A system for detecting an array of samples having detectable samples and at least one reference sample is provided. The system comprises an electromagnetic radiation source, a sensing surface comprising a plurality of sample fields, wherein the plurality of sample fields comprise at least one reference field, a phase difference generator configured to introduce differences in pathlengths of one or more samples in the array of samples, and an imaging spectrometer configured to image one or more samples in the array of samples.

Abstract: A method of removing a metal-containing layer (e.g., tungsten) from a substrate is provided. The method includes generating a first plasma in a process volume of a plasma chamber when a patterned device is disposed on a substrate support in the process volume. The patterned device includes a patterned region and an unpatterned region; a substrate; a tungsten-containing layer formed over the substrate; a supporting layer disposed between the tungsten-containing layer and the substrate. The patterned region includes exposed surfaces of the supporting layer and the unpatterned region does not include any exposed surfaces of the supporting layer. The method further includes depositing a first film over the patterned region of the tungsten-containing layer with the first plasma; and removing portions of the unpatterned region of the tungsten-containing layer with the first plasma without depositing the first film over the unpatterned region.

Abstract: A method of etching a hardmask layer formed on a substrate is provided. The method includes supplying an etching gas mixture to a processing region of a processing chamber. A device substrate is disposed in the processing region when the etching gas mixture is supplied to the processing region. The device substrate comprises a substrate and a hardmask layer formed over the substrate. The etching gas mixture comprises a fluorine-containing gas, a silicon-containing gas, and an oxygen-containing gas. The method further includes providing RF power to the etching gas mixture to form a plasma in the processing region. The plasma is configured to etch exposed portions of the hardmask layer.

Abstract: Methods for etching a bottom anti-reflective coating (BARC) and/or an anti-reflective coating (ARC) and/or a dielectric anti-reflective coating (DARC) to form high aspect ratio features using an etch process are provided. The methods described herein advantageously facilitate profile and dimension control of features with high aspect ratios through a proper sidewall and bottom management scheme during the bottom anti-reflective coating (BARC) and/or an anti-reflective coating (ARC) and/or a dielectric anti-reflective coating (DARC) open process.

Abstract: Systems, methods, and computer readable media for expediting data access. The method embodiment may comprise the steps returning a result to a query for information requested from a hybrid database.

Abstract: Disclosed are systems, methods, and computer readable media for converting a natural language query into a logical query. The method embodiment comprises receiving a natural language query and converting the natural language query using an extensible engine to generate a logical query, the extensible engine being linked to the toolkit and knowledge base. In one embodiment, a natural language query can be processed in a domain independent method to generate a logical query.

Abstract: A system for detecting an array of samples having detectable samples and at least one reference sample is provided. The system comprises an electromagnetic radiation source, a sensing surface comprising a plurality of sample fields, wherein the plurality of sample fields comprise at least one reference field, a phase difference generator configured to introduce differences in pathlengths of one or more samples in the array of samples, and an imaging spectrometer configured to image one or more samples in the array of samples.

Abstract: A software compass used during a GPS outage calculates vehicle heading and presents it upon request. The software compass gathers information from a yaw rate sensor, wheel steering angle sensor, wheel speed sensor, and PRNDL gear position sensor to calculate vehicle heading using a weighting algorithm. Because the yaw rate sensor data is a central factor in calculating vehicle heading, the quality of calibration of the yaw rate sensor is of importance. The disclosed calibration algorithm calculates the yaw rate bias and scale factors to calibrate the yaw rate sensor.

Abstract: A software compass used during a GPS outage calculates vehicle heading and presents it upon request. The software compass gathers information from a yaw rate sensor, wheel steering angle sensor, wheel speed sensor, and PRNDL gear position sensor to calculate vehicle heading using a weighting algorithm. Because the yaw rate sensor data is a central factor in calculating vehicle heading, the quality of calibration of the yaw rate sensor is of importance. The disclosed calibration algorithm calculates the yaw rate bias and scale factors to calibrate the yaw rate sensor.

Abstract: Disclosed are systems, methods, and computer readable media for distributing queries to a group of databases and expediting data access.

Abstract: Disclosed are systems, methods, and computer readable media for converting a natural language query into a logical query. The method embodiment comprises receiving a natural language query and converting the natural language query using an extensible engine to generate a logical query, the extensible engine being linked to the toolkit and knowledge base. In one embodiment, a natural language query can be processed in a domain independent method to generate a logical query.

Abstract: A method of improving a vehicle emergency call network used during an enhanced 911 call, which is especially useful in environments having degraded GPS signals. The present method utilizes an independent position enhancement algorithm, such as a dead reckoning algorithm, and converts the output of that algorithm into a compatible format compatible with a position determining entity (PDE). Some independent position enhancement algorithms return output in the form of position information (typically, two- or three-dimensional coordinates), however, most PDEs only accept information in the form of pseudo-ranges. Thus, the present method provides a technique in which the advantages of an independent position enhancement algorithm are enjoyed, yet a compatible output is sent to the PDE.