Patents by Inventor Abid L. Khan

Abid L. Khan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Temperature sensing in controlled environment
    Publication number: 20040004990
    Abstract: Temperature-sensing apparatus is mounted within a wafer chuck to contact the underside surface of a wafer secured thereby. Photoluminescent material on a sensing element that is mounted in resilient contact with a wafer emits luminous flux in response to radiant-energy stimulation with a characteristic intensity that varies with time as a function of temperature. An optical channel couples radiant energy between the photoluminescent material and a remote optical analyzer that supplies pulses of radiant energy and receives the luminous flux to determine the temperature of the sensing element in contact with the wafer.
    Type: Application
    Filed: June 24, 2003
    Publication date: January 8, 2004
    Inventor: Abid L. Khan
  • Temperature sensing in controlled environment
    Publication number: 20030112848
    Abstract: Temperature-sensing apparatus is mounted within a wafer chuck to contact the underside surface of a wafer secured thereby. Photoluminescent material on a sensing element that is mounted in resilient contact with a wafer emits luminous flux in response to radiant-energy stimulation with a characteristic intensity that varies with time as a function of temperature. An optical channel couples radiant energy between the photoluminescent material and a remote optical analyzer that supplies pulses of radiant energy and receives the luminous flux to determine the temperature of the sensing element in contact with the wafer.
    Type: Application
    Filed: June 12, 2002
    Publication date: June 19, 2003
    Inventor: Abid L. Khan