Abstract: A MEMS device includes a first deflectable membrane structure, a rigid electrode structure and a second deflectable membrane structure in a vertically spaced configuration. The rigid electrode structure is arranged between the first and second deflectable membrane structures. The first and second deflectable membrane structures each includes a deflectable portion, and the deflectable portions of the first and second deflectable membrane structures are mechanically coupled by mechanical connection elements to each other and are mechanically decoupled from the rigid electrode structure. At least a subset of the mechanical connection elements are elongated mechanical connection elements.

Abstract: The present disclosure relates to a sensor device including a gas sensor disposed on a first substrate, a heating element disposed within the first substrate so that the gas sensor overlaps the heating element, a processor operatively coupled to the gas sensor and the heating element, and a memory storing a program to be executed by the processor. The gas sensor is configured to measure first sensor data points and second sensor data points. The program includes instructions for performing the following steps in real-time: recording first resistance values and second resistance values of the heating element; adjusting the second sensor data points using the first sensor data points, the first resistance values, and the second resistance values to obtain corrected sensor data points; and determining sensed values from the corrected sensor data points.

Abstract: A MicroElectroMechanical (MEMS) device includes a suspended electrode structure anchored to a substrate, the MEMS device having a MEMS resonance mode, and a Tuned Mass Damping (TMD) structure, wherein a portion of the suspended electrode structure forms a TMD structure having a TMD spring element and a TMD mass element, for providing a TMD resonance mode counteracting the MEMS resonance mode.

Abstract: The present disclosure relates to a sensor device including a gas sensor disposed on a first substrate, a heating element disposed within the first substrate so that the gas sensor overlaps the heating element, a processor operatively coupled to the gas sensor and the heating element, and a memory storing a program to be executed by the processor. The gas sensor is configured to measure first sensor data points and second sensor data points. The program includes instructions for performing the following steps in real-time: recording first resistance values and second resistance values of the heating element; adjusting the second sensor data points using the first sensor data points, the first resistance values, and the second resistance values to obtain corrected sensor data points; and determining sensed values from the corrected sensor data points.

Abstract: A sensor device includes a gas sensor disposed on a first substrate, a heating element disposed within the first substrate, a processor operatively coupled to the gas sensor and the heating element, and a memory storing a program to be executed by the processor. The gas sensor is configured to measure first sensor data points and second sensor data points. The gas sensor overlaps the heating element. The program includes instructions for performing the following steps in real-time: recording first resistance values and second resistance values of the heating element; adjusting the second sensor data points using the first sensor data points, the first resistance values, and the second resistance values to obtain corrected sensor data points; and determining sensed values from the corrected sensor data points.

Abstract: The present disclosure concerns a micromechanical device and a method for manufacturing the same. The micromechanical device may comprise a membrane structure suspended on a substrate. The membrane structure may comprise a perforated gas permeable membrane comprising a plurality of perforations, and a reinforcement structure being coupled with the perforated membrane for stiffening the perforated membrane and/or for increasing the mechanical stability of the perforated membrane in order to attenuate an oscillation of the perforated membrane.

Abstract: A sensor device includes a gas sensor disposed on a first substrate, a heating element disposed within the first substrate, a processor operatively coupled to the gas sensor and the heating element, and a memory storing a program to be executed by the processor. The gas sensor is configured to measure first sensor data points and second sensor data points. The gas sensor overlaps the heating element. The program includes instructions for performing the following steps in real-time: recording first resistance values and second resistance values of the heating element; adjusting the second sensor data points using the first sensor data points, the first resistance values, and the second resistance values to obtain corrected sensor data points; and determining sensed values from the corrected sensor data points.

Abstract: In accordance with an embodiment, a MEMS sensor includes a membrane that is suspended from the substrate, a resonant frequency of said membrane being influenced by an ambient pressure that acts on the membrane; and an evaluation device configured to perform a first measurement based on the resonant frequency of the membrane to obtain a measurement result, where the evaluation device is configured to at least partly compensate an influence of the ambient pressure on the measurement result.

Abstract: A MEMS device includes a membrane and a counter electrode structure spaced apart from the membrane. The counter electrode structure includes a non-planar conductive layer. The MEMS device includes an air gap between the membrane and the counter electrode structure. The air gap has a non-uniform thickness.

Abstract: A MEMS device includes a membrane and a counter electrode structure spaced apart from the membrane. The counter electrode structure includes a non-planar conductive layer. The MEMS device includes an air gap between the membrane and the counter electrode structure. The air gap has a non-uniform thickness.

Abstract: In accordance with an embodiment, a MEMS sensor includes a membrane that is suspended from the substrate, a resonant frequency of said membrane being influenced by an ambient pressure that acts on the membrane; and an evaluation device configured to perform a first measurement based on the resonant frequency of the membrane to obtain a measurement result, where the evaluation device is configured to at least partly compensate an influence of the ambient pressure on the measurement result