Patents by Inventor Abril C. Cabreros

Abril C. Cabreros has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6500266
    Abstract: An apparatus of a reactor or processing chamber comprising a chamber having a resistive heater disposed within a volume of the chamber, including a stage having a surface area to support a substrate such as a wafer and a body including at least one heating element, a shaft coupled to the body, a plurality of temperature sensors coupled to the chamber, each configured to measure a temperature at separate points associated with the surface area of the stage, and a motor coupled to the shaft and configured to rotate the resistive heater about an axis through the shaft. In this manner, the temperature sensors may measure a temperature at separate points of the surface area of the stage. A method of rotating a shaft and measuring a plurality of temperatures over the surface area of the stage or over a wafer seated on the stage with the plurality of temperature sensors.
    Type: Grant
    Filed: January 18, 2000
    Date of Patent: December 31, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Henry Ho, Alexander M. Rubinchik, Aihua Chen, Abril C. Cabreros, Steven T. Li, Mark Yam, Bruce W. Peuse