Patents by Inventor Abyaya Dhar

Abyaya Dhar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Edge defect detection via image analytics
    Patent number: 12211195
    Abstract: The present disclosure includes edge defect detection via image analytics. A method includes identifying an image of an edge of a susceptor pocket formed by a susceptor of a substrate processing system. The method further includes predicting, based on the image, whether property values of the edge of the susceptor meet threshold values. The method further includes, responsive to the property values of the edge meeting threshold values, causing performance of a corrective action associated with the susceptor.
    Type: Grant
    Filed: September 21, 2022
    Date of Patent: January 28, 2025
    Assignee: Applied Materials, Inc.
    Inventors: Yash Chhabra, Abyaya Dhar, Joseph Liu, Yi Nung Wu, Boon Sen Chan, Sidda Reddy Kurakula, Chandrasekhar Roy
  • Clog detection via image analytics
    Patent number: 12136225
    Abstract: A method includes identifying an image of a substrate processing equipment part that forms a plurality of holes. The method further includes determining, by a processing device based on the image, a corresponding neighboring angular distance of each of the plurality of holes and a corresponding area of each of the plurality of holes. The method further includes identifying, by the processing device, a first subset of the plurality of holes that are at least partially clogged based on at least one of the corresponding neighboring angular distance or the corresponding area of each of the plurality of holes. A corrective action associated with the substrate processing equipment part is to be performed based on the first subset of the plurality of holes that are at least partially clogged.
    Type: Grant
    Filed: September 9, 2022
    Date of Patent: November 5, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Yash Chhabra, Abyaya Dhar, Boon Sen Chan, Yenwei Hung, Sidda Reddy Kurakula, Chandrasekhar Roy, Chih Chuan Wang
  • EDGE DEFECT DETECTION VIA IMAGE ANALYTICS
    Publication number: 20240095899
    Abstract: The present disclosure includes edge defect detection via image analytics. A method includes identifying an image of an edge of a susceptor pocket formed by a susceptor of a substrate processing system. The method further includes predicting, based on the image, whether property values of the edge of the susceptor meet threshold values. The method further includes, responsive to the property values of the edge meeting threshold values, causing performance of a corrective action associated with the susceptor.
    Type: Application
    Filed: September 21, 2022
    Publication date: March 21, 2024
    Inventors: Yash Chhabra, Abyaya Dhar, Joseph Liu, Yi Nung Wu, Boon Sen Chan, Sidda Reddy Kurakula, Chandrasekhar Roy
  • CLOG DETECTION VIA IMAGE ANALYTICS
    Publication number: 20240087135
    Abstract: A method includes identifying an image of a substrate processing equipment part that forms a plurality of holes. The method further includes determining, by a processing device based on the image, a corresponding neighboring angular distance of each of the plurality of holes and a corresponding area of each of the plurality of holes. The method further includes identifying, by the processing device, a first subset of the plurality of holes that are at least partially clogged based on at least one of the corresponding neighboring angular distance or the corresponding area of each of the plurality of holes. A corrective action associated with the substrate processing equipment part is to be performed based on the first subset of the plurality of holes that are at least partially clogged.
    Type: Application
    Filed: September 9, 2022
    Publication date: March 14, 2024
    Inventors: Yash Chhabra, Abyaya Dhar, Boon Sen Chan, Yenwei Hung, Sidda Reddy Kurakula, Chandrasekhar Roy, Chih Chuan Wang