Patents by Inventor Achiam BAR

Achiam BAR has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for feedforward process control in the manufacture of semiconductor devices
    Patent number: 11635682
    Abstract: A method for process control in the manufacture of semiconductor devices including performing metrology on at least one Design of Experiment (DOE) semiconductor wafer included in a lot of semiconductor wafers, the lot forming part of a batch of semiconductor wafer lots, generating, based on the metrology, one or more correctables to a process used to manufacture the lot of semiconductor wafers and adjusting, based on the correctables, the process performed on at least one of; other semiconductor wafers included in the lot of semi-conductor wafers, and other lots of semiconductor wafers included in the batch.
    Type: Grant
    Filed: April 23, 2020
    Date of Patent: April 25, 2023
    Assignee: KLA Corporation
    Inventors: Roie Volkovich, Liran Yerushalmi, Achiam Bar
  • SYSTEMS AND METHODS FOR FEEDFORWARD PROCESS CONTROL IN THE MANUFACTURE OF SEMICONDUCTOR DEVICES
    Publication number: 20220004096
    Abstract: A method for process control in the manufacture of semiconductor devices including performing metrology on at least one Design of Experiment (DOE) semiconductor wafer included in a lot of semiconductor wafers, the lot forming part of a batch of semiconductor wafer lots, generating, based on the metrology, one or more correctables to a process used to manufacture the lot of semiconductor wafers and adjusting, based on the correctables, the process performed on at least one of; other semiconductor wafers included in the lot of semi-conductor wafers, and other lots of semiconductor wafers included in the batch.
    Type: Application
    Filed: April 23, 2020
    Publication date: January 6, 2022
    Inventors: Roie VOLKOVICH, Liran YERUSHALMI, Achiam BAR