Abstract: In a first aspect, the invention relates to a photoacoustic gas sensor comprising a gas-fillable detection chamber and a reference chamber arranged laterally adjacent to each other and connected by a sensor channel. A sensor located at or in the sensor channel allows measurement of the photoacoustic signals. Both chambers are preferably located in a plane perpendicular to the emitted IR radiation of the IR emitter which is also comprised. The gas sensor is also formed from a multilayer substrate. In further aspects, the invention also relates to a method of manufacturing a gas sensor and a method of analyzing gas with a gas sensor.

Abstract: In a first aspect, the invention relates to a system comprising a MEMS microphone comprising a sound inlet opening, a vibratable microphone membrane and an electronic circuit, wherein when the microphone membrane is excited by sound waves entering through the sound inlet opening, an electrical signal that is dependent on the sound waves is generated by vibrations of the microphone membrane. A damping element for reducing the sound pressure level of the sound waves acting on the microphone membrane is mounted in front of the sound inlet opening, wherein the damping element comprises an elastic and vibratable damping membrane and wherein, in addition to the microphone membrane, the damping element is induced into vibrations by the sound waves such that the sound energy of the sound waves is divided between the damping membrane and the microphone membrane.

Abstract: In a first aspect, the invention relates to a method for producing a gas-filled reference chamber which is hermetically sealed. Thereby, the gas with which the reference chamber is filled is introduced via an opening in a separate coating chamber only after bonding of the wafers forming the reference chamber. The reference chamber preferably contains MEMS devices. In another aspect, the invention relates to a photoacoustic gas sensor comprising such a reference chamber within which a MEMS sensor is present.

Abstract: The invention relates to a strain-measuring structure, comprising a carrier, which is divided into regions along the predetermined breaking points only after being joined to the object to be measured. After the separation along the predetermined breaking points, the regions individually joined in the joining zones can be moved freely relative to one another in the event of strain of the object, without the strain-measuring structure applying significant forces to the object to be measured, which could distort the strain measurement. Measuring assemblies for measuring strain lie between the regions. Said measuring assemblies can be based on different principles, depending on the application. The invention further relates to a method for producing the strain-measuring structure, to a method for measuring the strain of objects, and to the use of the structure to measure strain.

Abstract: In a first aspect, the invention relates to a method for producing a gas-filled reference chamber which is hermetically sealed. Thereby, the gas with which the reference chamber is filled is introduced via an opening in a separate coating chamber only after bonding of the wafers forming the reference chamber. The reference chamber preferably contains MEMS devices. In another aspect, the invention relates to a photoacoustic gas sensor comprising such a reference chamber within which a MEMS sensor is present.

Abstract: The invention relates to a modulatable infrared emitter comprising a MEMS heating element and an actuator, wherein the actuator triggers shape and/or structure changes of the MEMS heating element. Said change in shape and/or structure of the MEMS heating element may vary the ratio of the emitting area to the total area, thereby producing a change in intensity of the emitted infrared beam. The invention further relates to a manufacturing method for the infrared emitter, a method for modulated emission of infrared radiation using the infrared emitter, and preferred uses of the infrared emitter. In further preferred aspects the invention relates to a system comprising the infrared emitter and a control device for regulating the actuator.

Abstract: The invention relates, in a first aspect, to a photoacoustic spectroscope for analyzing gas, comprising an infrared emitter (3), which can be modulated, an analysis volume (1), which can be filled with gas, and a sound pressure detector. The sound pressure detector comprises a structure (5) capable of vibrating, an actuator and a measurement unit, wherein the actuator is configured to actively excite vibration of the structure (5) capable of vibrating and the measurement unit can measure the vibration properties of the structure (5) capable of vibrating, which measurement depends on the formation of the sound pressure waves.

Abstract: The invention relates to a modulatable infrared emitter comprising a heating element, a planar base element, a dielectric interlayer, and a planar cover element which is a structured metamaterial, and an actuator, wherein the actuator is configured for a relative movement of the cover element and the base element between a first and a second position in order to modulate the intensity of the emission of the infrared emitter. The invention further relates to production methods for the infrared emitter, methods for the modulated emission of infrared red radiation by means of the infrared emitter, and preferred uses of the infrared emitter. A system comprising the infrared emitter and a control device for regulating the actuator are also preferably the subject matter of the invention.

Abstract: A MEMS actuator comprising a frame structure and at least one actuator arm. The actuator arm is connected at a first end to the frame structure and at a second end to an actuator body. The MEMS actuator is characterized in that the at least one actuator arm has a meander structure comprising two or more actuator sections. The two or more actuator sections are oriented substantially perpendicular to the longitudinal axis of the actuator arm. Furthermore, the two or more actuator sections comprise at least one layer of an actuator material, wherein a movement of the actuator body can be effected by actuating the two or more actuator sections. Further disclosed is a method for producing the MEMS actuator.

Abstract: The invention relates to a MEMS transducer comprising a vibratable membrane for generating or receiving pressure waves in a fluid in a vertical direction, wherein the vibratable membrane is supported by a carrier and the vibratable membrane exhibits two or more vertical sections which are formed parallel to the vertical direction and comprise at least one layer of actuator material. The end of the vibratable membrane is preferably connected to an electrode, such that the two or more vertical sections can be induced to vibrate horizontally by driving the at least one electrode, or such that an electrical signal can be generated at the at least one electrode when the two or more vertical sections are induced to vibrate horizontally.

Abstract: In a first aspect, the invention relates to a method for detecting aerosol particles in ambient air by means of a photoacoustic gas sensor, wherein an analysis volume is present in the beam path of a modulable emitter such that the emitter can use modulable radiation to excite aerosol particles in the analysis volume to form sound pressure waves which are detectable by means of the sensor. Using the modulable emitter, the analysis volume is irradiated with the modulated radiation to generate sound pressure waves. The generated sound pressure waves are measured by means of the sensor, whereby the presence and/or concentration of the aerosol particles in the ambient air is determined on the basis of the measurement results. Particularly preferably, the aerosol particles are bioaerosols, preferably pollen, spores, bacteria and viruses. In a further aspect, the invention preferably relates to a photoacoustic gas sensor suitable for carrying out the method.

Abstract: The invention relates to a modulatable infrared emitter comprising an aperture structure, a structured micro-heating element, and an actuator, wherein the aperture structure and the structured micro-heating element are movable relative to each other in parallel planes by means of the actuator to modulate the intensity of emitted infrared radiation. The invention further relates to methods of manufacturing the infrared emitter, a method of modulating emission of infrared radiation using the infrared emitter, and preferred uses of the infrared emitter. In further aspects the invention relates to a system comprising the infrared emitter and a control device for regulating the actuator.

Abstract: Preferably, the invention relates to a MEMS package having at least one layer for protecting a MEMS element, wherein the MEMS element has at least one MEMS interaction region on a substrate and a surface conformal coating of the MEMS element is applied with a dielectric layer. Particularly preferably, the invention relates to a MEMS transducer package in which a MEMS element, for example with a MEMS membrane and processor, preferably an integrated circuit, are present on a substrate. For protection, a surface conformal coating of a dielectric is preferably first applied to the MEMS element, for example by spray coating, mist coating, and/or vapor coating. Then, preferably, an electrically conductive layer is applied. Depending on the configuration, the layers may be removed in some regions above a MEMS interaction region of the MEMS element, for example for a sound port of a MEMS membrane.

Abstract: The invention relates to a MEMS transducer comprising a vibratable membrane for generating or receiving pressure waves in a fluid in a vertical direction, wherein the vibratable membrane is supported by a carrier and the vibratable membrane exhibits two or more vertical sections which are formed parallel to the vertical direction and comprise at least one layer of actuator material. The end of the vibratable membrane is preferably connected to an electrode, such that the two or more vertical sections can be induced to vibrate horizontally by driving the at least one electrode, or such that an electrical signal can be generated at the at least one electrode when the two or more vertical sections are induced to vibrate horizontally.

Abstract: In a first aspect, the invention relates to a photoacoustic gas sensor comprising a gas-fillable detection chamber and a reference chamber arranged laterally adjacent to each other and connected by a sensor channel. A sensor located at or in the sensor channel allows measurement of the photoacoustic signals. Both chambers are preferably located in a plane perpendicular to the emitted IR radiation of the IR emitter which is also comprised. The gas sensor is also formed from a multilayer substrate. In further aspects, the invention also relates to a method of manufacturing a gas sensor and a method of analyzing gas with a gas sensor.

Abstract: The invention relates, in a first aspect, to a photoacoustic spectroscope for analyzing gas, comprising an infrared emitter (3), which can be modulated, an analysis volume (1), which can be filled with gas, and a sound pressure detector. The sound pressure detector comprises a structure (5) capable of vibrating, an actuator and a measurement unit, wherein the actuator is configured to actively excite vibration of the structure (5) capable of vibrating and the measurement unit can measure the vibration properties of the structure (5) capable of vibrating, which measurement depends on the formation of the sound pressure waves.

Abstract: The invention relates to a modulatable infrared emitter comprising a heating element, a planar base element, a dielectric interlayer, and a planar cover element which is a structured metamaterial, and an actuator, wherein the actuator is configured for a relative movement of the cover element and the base element between a first and a second position in order to modulate the intensity of the emission of the infrared emitter. The invention further relates to production methods for the infrared emitter, methods for the modulated emission of infrared red radiation by means of the infrared emitter, and preferred uses of the infrared emitter. A system comprising the infrared emitter and a control device for regulating the actuator are also preferably the subject matter of the invention.

Abstract: The invention relates to a modulatable infrared emitter comprising an aperture structure, a structured micro-heating element, and an actuator, wherein the aperture structure and the structured micro-heating element are movable relative to each other in parallel planes by means of the actuator to modulate the intensity of emitted infrared radiation. The invention further relates to methods of manufacturing the infrared emitter, a method of modulating emission of infrared radiation using the infrared emitter, and preferred uses of the infrared emitter. In further aspects the invention relates to a system comprising the infrared emitter and a control device for regulating the actuator.

Abstract: The invention relates to a modulatable infrared emitter comprising a MEMS heating element and an actuator, wherein the actuator triggers shape and/or structure changes of the MEMS heating element. Said change in shape and/or structure of the MEMS heating element may vary the ratio of the emitting area to the total area, thereby producing a change in intensity of the emitted infrared beam. The invention further relates to a manufacturing method for the infrared emitter, a method for modulated emission of infrared radiation using the infrared emitter, and preferred uses of the infrared emitter. In further preferred aspects the invention relates to a system comprising the infrared emitter and a control device for regulating the actuator.

Abstract: The invention relates to a strain-measuring structure, comprising a carrier, which is divided into regions along the predetermined breaking points only after being joined to the object to be measured. After the separation along the predetermined breaking points, the regions individually joined in the joining zones can be moved freely relative to one another in the event of strain of the object, without the strain-measuring structure applying significant forces to the object to be measured, which could distort the strain measurement. Measuring assemblies for measuring strain lie between the regions. Said measuring assemblies can be based on different principles, depending on the application. The invention further relates to a method for producing the strain-measuring structure, to a method for measuring the strain of objects, and to the use of the structure to measure strain.