Patents by Inventor Achim von Keudell

Achim von Keudell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ionization device with mass spectrometer therewith
    Patent number: 10236169
    Abstract: An ionization device includes: a plasma generating device for generating metastable particles and/or ions of an ionization gas in a primary plasma region; a field generating device for generating a glow discharge in a secondary plasma region; an inlet for supplying a gas to be ionized into the secondary plasma region; and a further inlet for supplying the metastable particles and/or the ions of the ionization gas into the secondary plasma region. A mass spectrometer includes such an ionization device and a detector downstream of the outlet of the ionization device for the mass-spectrometric analysis of the ionized gas.
    Type: Grant
    Filed: June 8, 2017
    Date of Patent: March 19, 2019
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Michel Aliman, Hin Yiu Anthony Chung, Gennady Fedosenko, Ruediger Reuter, Alexander Laue, Achim von Keudell, Marc Boeke, Thorsten Benter, Joerg Winter, Peter Awakowicz, Leonid Gorkhover
  • IONIZATION DEVICE WITH MASS SPECTROMETER THEREWITH
    Publication number: 20170278690
    Abstract: An ionization device includes: a plasma generating device for generating metastable particles and/or ions of an ionization gas in a primary plasma region; a field generating device for generating a glow discharge in a secondary plasma region; an inlet for supplying a gas to be ionized into the secondary plasma region; and a further inlet for supplying the metastable particles and/or the ions of the ionization gas into the secondary plasma region. A mass spectrometer includes such an ionization device and a detector downstream of the outlet of the ionization device for the mass-spectrometric analysis of the ionized gas.
    Type: Application
    Filed: June 8, 2017
    Publication date: September 28, 2017
    Inventors: Michel Aliman, Hin Yiu Anthony Chung, Gennady Fedosenko, Ruediger Reuter, Alexander Laue, Achim von Keudell, Marc Boeke, Thorsten Benter, Joerg Winter, Peter Awakowicz, Leonid Gorkhover