Patents by Inventor Achla Khanna

Achla Khanna has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ULTRA HIGH VOID VOLUME POLISHING PAD WITH CLOSED PORE STRUCTURE
    Publication number: 20150056895
    Abstract: The invention provides a polishing pad for chemical-mechanical polishing comprising a porous polymeric material, wherein the polishing pad comprises closed pores and wherein the polishing pad has a void volume fraction of 70% or more. Also disclosed is a method for preparing the aforesaid polishing pad and a method of polishing a substrate by use of theaforesaid polishing pad.
    Type: Application
    Filed: August 22, 2013
    Publication date: February 26, 2015
    Inventors: George Fotou, Achla Khanna, Robert Vacassy