Abstract: A mirror drive device is provided whereby conduction faults due to short-circuiting can be eliminated. A mirror drive device 1A is provided with a fixed frame, a movable frame 14, a mirror, and a permanent magnet 10. The movable frame 14 has a substrate 100, a drive coil 18, covering layer 102 and an insulating layer 104. The substrate 100 includes a groove 100a extending in spiral fashion and located at the side of the main face S4. A drive coil 18 is constituted by metallic material arranged within the groove 100a. The covering layer 102 extends to above the main face S4 so as to cover the aperture of the groove 100a and is constituted by metallic material that suppresses diffusion of the metallic material constituting the drive coil 18. The insulating layer 104 is arranged on the main face S4 and the covering layer 102.

Abstract: A mirror drive device is provided whereby conduction faults due to short-circuiting can be eliminated. A mirror drive device 1A is provided with a fixed frame, a movable frame 14, a mirror, and a permanent magnet 10. The movable frame 14 has a substrate 100, a drive coil 18, covering layer 102 and an insulating layer 104. The substrate 100 includes a groove 100a extending in spiral fashion and located at the side of the main face S4. A drive coil 18 is constituted by metallic material arranged within the groove 100a. The covering layer 102 extends to above the main face S4 so as to cover the aperture of the groove 100a and is constituted by metallic material that suppresses diffusion of the metallic material constituting the drive coil 18. The insulating layer 104 is arranged on the main face S4 and the covering layer 102.