Patents by Inventor Adaeze OSONKIE

Adaeze OSONKIE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FORMING A DOPED HARDMASK
    Publication number: 20240021433
    Abstract: Methods for depositing a hardmask with ions implanted at different tilt angles are described herein. By performing ion implantation to dope an amorphous carbon hardmask at multiple tilt angles, an evenly distributed dopant profiled can be created. The implant tilt angle will determine a dopant profile that enhances the carbon hardmask hardness.
    Type: Application
    Filed: October 13, 2022
    Publication date: January 18, 2024
    Inventors: Scott FALK, Rajesh PRASAD, Sarah Michelle BOBEK, Harry WHITESELL, Kurt DECKER-LUCKE, Kyu-Ha SHIM, Adaeze OSONKIE, Tomohiko KITAJIMA