Patents by Inventor Adam Dan Ticknor

Adam Dan Ticknor has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device and method for preventing settlement of particles on a chemical-mechanical polishing pad
    Patent number: 5968841
    Abstract: A device and method for preventing settlement of particles on a chemical-mechanical polishing pad is provided. Specifically, a device capable of preventing settlement of particles on the pad is located between the polishing pad and a platen of a chemical-mechanical polishing apparatus.
    Type: Grant
    Filed: May 6, 1997
    Date of Patent: October 19, 1999
    Assignee: International Business Machines Corporation
    Inventors: William Francis Landers, Michael Francis Lofaro, Adam Dan Ticknor
  • Vertical polishing tool and method
    Patent number: 5897425
    Abstract: A vertically-oriented wafer polishing apparatus and method is disclosed including a vertically-oriented polishing device, a semiconductor wafer carrier and a cleaning module to clean the polishing device by removing contaminants that may scratch the wafer and also reduce the polishing rate of the apparatus. The device reduces the "down time" of a polishing apparatus and, therefore, increases the yield of well-polished wafers in a given time period.
    Type: Grant
    Filed: April 30, 1997
    Date of Patent: April 27, 1999
    Assignee: International Business Machines Corporation
    Inventors: Thomas Robert Fisher, Jr., Carol Elaine Christine Gustafson, William Francis Landers, John Carlo Minunni, Jr., Thomas Edwin Sandwick, Adam Dan Ticknor