Abstract: A clock apparatus, with: (i) a gas cell, including a cavity including a sealed interior for providing a signal waveguide; (ii) a first apparatus for providing a first electromagnetic wave to travel in the cavity and along a first direction; (iii) a second apparatus for providing a second electromagnetic wave to travel in the cavity and along a second direction opposite the first direction; (iv) a dipolar gas inside the sealed interior of the cavity; and (v) receiving apparatus for detecting an amount of energy in the second electromagnetic wave after the second electromagnetic wave passes through the dipolar gas.

Abstract: A clock apparatus with: (i) a gas cell, including a continuous path cavity including a sealed interior for providing a signal waveguide; (ii) an apparatus for providing an electromagnetic wave to travel along the continuous path cavity and for circulating around the continuous path cavity back toward and past a point of entry of the electromagnetic wave in the continuous path cavity; (iii) a dipolar gas inside the sealed interior of the cavity; and (iv) receiving apparatus for detecting an amount of energy in the electromagnetic wave, wherein the amount of energy is responsive to an amount of absorption of the electromagnetic wave as the electromagnetic wave passes through the dipolar gas.

Abstract: Described examples include a method of fabricating a gas cell, including forming a cavity in a first substrate, providing a nonvolatile precursor material in the cavity of the first substrate, bonding a second substrate to the first substrate to form a sealed cavity including the nonvolatile precursor material in the cavity, and activating the precursor material after or during forming the sealed cavity to release a target gas inside the sealed cavity.

Abstract: One or more apparatus providing over-travel protection for actuators are disclosed. An example apparatus includes a mirror; a first plate coupled to the mirror; and a support post coupled the first plate, the support post structured to prevent the mirror from moving within a threshold distance to a second plate.

Abstract: In methods and apparatus for increasing efficiency and optical bandwidth of a microelectromechanical system piston-mode spatial light modulator, an example apparatus includes: an electrode with spring legs; a base electrode; a mirror displacement determiner to determine a periodic signal corresponding to a displacement distance of the electrode beyond an instability point of the electrode; and a voltage source to output a periodic voltage to the base electrode in response to the periodic signal. The periodic voltage causes the spring legs to vary displacement of the electrode with respect to the base electrode according to the periodic voltage. The displacement includes distances beyond the instability point.

Abstract: Disclosed examples provide gas cells and a method of fabricating a gas cell, including forming a cavity in a first substrate, forming a first conductive material on a sidewall of the cavity, forming a glass layer on the first conductive material, forming a second conductive material on a bottom side of a second substrate, etching the second conductive material to form apertures through the second conductive material, forming conductive coupling structures on a top side of the second substrate, and bonding a portion of the bottom side of the second substrate to a portion of the first side of the first substrate to seal the cavity.

Abstract: A method includes forming a plurality of layers of an oxide and a metal on a substrate. For example, the layers may include a metal layer sandwiched between silicon oxide layers. A non-conductive structure such as glass is then bonded to one of the oxide layers. An antenna can then be patterned on the non-conductive structure, and a cavity can be created in the substrate. Another metal layer is deposited on the surface of the cavity, and an iris is patterned in the metal layer to expose the one of the oxide layers. Another metal layer is formed on a second substrate and the two substrates are bonded together to thereby seal the cavity.

Abstract: Methods for depositing a measured amount of a species in a sealed cavity. In one example, a method for depositing molecules in a sealed cavity includes depositing a selected number of microcapsules in a cavity. Each of the microcapsules contains a predetermined amount of a first fluid. The cavity is sealed after the microcapsules are deposited. After the cavity is sealed the microcapsules are ruptured to release molecules of the first fluid into the cavity.

Abstract: An illustrate method (and device) includes etching a cavity in a first substrate (e.g., a semiconductor wafer), forming a first metal layer on a first surface of the first substrate and in the cavity, and forming a second metal layer on a non-conductive structure (e.g., glass). The method also may include removing a portion of the second metal layer to form an iris to expose a portion of the non-conductive structure, forming a bond between the first metal layer and the second metal layer to thereby attach the non-conductive structure to the first substrate, sealing an interface between the non-conductive structure and the first substrate, and patterning an antenna on a surface of the non-conductive structure.

Abstract: A pressure transducer includes a cavity, a first dipolar molecule disposed within the cavity, and a second dipolar molecule disposed within the cavity. The first dipolar molecule exhibits a quantum rotational state transition at a fixed frequency with respect to cavity pressure. The second dipolar molecule exhibits a quantum rotation state transition at a frequency that varies with cavity pressure.

Abstract: An electronic device includes a package substrate, a circuit assembly, and a housing. The circuit assembly is mounted on the package substrate. The circuit assembly includes a first sealed cavity formed in a device substrate. The housing is mounted on the package substrate to form a second sealed cavity about the circuit assembly.

Abstract: A pressure transducer includes a cavity, dipolar molecules disposed within the cavity, and pressure measurement circuitry. The pressure measurement circuitry is configured to measure a width of an absorption peak of the dipolar molecules, and to determine a value of pressure in the cavity based on the width of the absorption peak.

Abstract: A device includes a substrate that includes a resonant cavity. The resonant cavity includes a plurality of dipolar molecules that have an absorption frequency. The resonant cavity resonates at a frequency that is equal to the absorption frequency of the dipolar molecules. The device further includes a first port on the resonant cavity configured to receive a radio frequency (RF) signal.

Abstract: A method for forming a sealed cavity includes bonding a non-conductive structure to a first substrate to form a non-conductive aperture into the first substrate. On a surface of the non-conductive structure opposite the first substrate, the method includes depositing a first metal layer. The method further includes patterning a first iris in the first metal layer, depositing a first dielectric layer on a surface of the first metal layer opposite the non-conductive structure, and patterning an antenna on a surface of the first dielectric layer opposite the first metal layer. The method also includes creating a cavity in the first substrate, depositing a second metal layer on a surface of the cavity, patterning a second iris in the second metal layer, and bonding a second substrate to a surface of the first substrate opposite the non-conductive structure to thereby seal the cavity.

Abstract: An apparatus includes a substrate containing a cavity and a dielectric structure covering at least a portion of the cavity. The cavity is hermetically sealed. The apparatus also may include a launch structure formed on the dielectric structure and outside the hermetically sealed cavity. The launch structure is configured to cause radio frequency (RF) energy flowing in a first direction to enter the hermetically sealed cavity through the dielectric structure in a direction orthogonal to the first direction. Various types of launch structures are disclosed herein.

Abstract: A method include forming a plurality of layers of an oxide and a metal on a substrate. For example, the layers may include a metal layer sandwiched between silicon oxide layers. A non-conductive structure such as glass is then bonded to one of the oxide layers. An antenna can then be patterned on the non-conductive structure, and a cavity can be created in the substrate. Another metal layer is deposited on the surface of the cavity, and an iris is patterned in the metal layer to expose the one of the oxide layers. Another metal layer is formed on a second substrate and the two substrates are bonded together to thereby seal the cavity.

Abstract: A MEMS switch includes a semiconductor substrate, a movable cantilever and a cantilever anchor. The semiconductor substrate includes a device layer and a handle. The movable cantilever is formed in the semiconductor substrate, and is disposed over a void in the handle. The cantilever anchor is formed in the semiconductor substrate and defines a side wall of the void. A metal portion is formed on at least a portion of the movable cantilever. A metal contact is formed proximate an end of the movable cantilever. A biasing metal contact is formed adjacent the cantilever. The biasing metal contact is electrically disconnected from the metal contact.