Patents by Inventor Adam Khan

Adam Khan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10546749
    Abstract: Disclosed herein is a new and improved system and method for fabricating monolithically integrated diamond semiconductor. The method may include the steps of seeding the surface of a substrate material, forming a diamond layer upon the surface of the substrate material; and forming a semiconductor layer within the diamond layer, wherein the diamond semiconductor of the semiconductor layer has n-type donor atoms and a diamond lattice, wherein the donor atoms contribute conduction electrons with mobility greater than 770 cm2/Vs to the diamond lattice at 100 kPa and 300K, and wherein the n-type donor atoms are introduced to the lattice through ion tracks.
    Type: Grant
    Filed: January 13, 2017
    Date of Patent: January 28, 2020
    Assignee: AKHAN Semiconductor, Inc.
    Inventor: Adam Khan
  • Patent number: 10422928
    Abstract: A system and method for diamond based multilayer antireflective coating for optical windows are provided. An antireflective coatings for optical windows may include an optical grade silicon substrate, a first polycrystalline diamond film on the silicon substrate, a germanium film on the first polycrystalline diamond film, a fused silica film on the germanium film; and a second polycrystalline diamond film on the fused silica film. A method of fabricating a diamond based multilayer antireflective coating may include the steps of cleaning and seeding an optical substrate, forming a first diamond layer on the optical substrate, forming a germanium layer on the first diamond layer, forming a fused silica layer on the germanium layer, cleaning and seeding the germanium layer, and forming a second diamond layer on the germanium layer.
    Type: Grant
    Filed: March 1, 2017
    Date of Patent: September 24, 2019
    Assignee: AKHAN SEMICONDUCTOR, INC.
    Inventors: Adam Khan, Robert Polak
  • Patent number: 10410860
    Abstract: A method for coating a substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The plasma ball has a diameter. The plasma ball is disposed at a first distance from the substrate and the substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the substrate, and a diamond coating is deposited on the substrate. The diamond coating has a thickness. Furthermore, the diamond coating has an optical transparency of greater than about 80%. The diamond coating can include nanocrystalline diamond. The microwave plasma source can have a frequency of about 915 MHz.
    Type: Grant
    Filed: August 14, 2017
    Date of Patent: September 10, 2019
    Assignee: UChicago Argonne, LLC
    Inventors: Anirudha V. Sumant, Adam Khan
  • Publication number: 20190139768
    Abstract: Disclosed herein is a new and improved system and method for fabricating diamond semiconductors. The method may include the steps of selecting a diamond semiconductor material having a surface, exposing the surface to a source gas in an etching chamber, forming a carbide interface contact layer on the surface; and forming a metal layer on the interface layer.
    Type: Application
    Filed: August 1, 2018
    Publication date: May 9, 2019
    Inventor: Adam Khan
  • Patent number: 10254445
    Abstract: A system and method for diamond based multilayer antireflective coating for optical windows are provided. An antireflective coatings for optical windows may include an optical grade silicon substrate; a plurality of polycrystalline diamond films, a plurality of germanium films, and a plurality of fused silica films. A method of fabricating a diamond based multilayer antireflective coating may include the steps of cleaning and seeding an optical substrate, forming a plurality of diamond layers above the optical substrate, forming a plurality of germanium layers above the optical substrate; and forming a plurality of fused silica layers above the optical substrate, wherein the reflectance of the antireflective coating is between 0.1 and 3.0 percent for infrared spectrum wavelengths between 1800 and 5000 nanometers.
    Type: Grant
    Filed: March 16, 2017
    Date of Patent: April 9, 2019
    Inventors: Adam Khan, Robert Polak
  • Patent number: 10224514
    Abstract: Disclosed herein is a transparent glass system that includes an optical grade silicon substrate, a transparent substrate layer; a titanium dioxide transparent layer, the transparent layer having an index of refraction of 2.35 or greater; and a polycrystalline diamond layer, wherein the transparent layer is between the substrate layer and the polycrystalline diamond layer.
    Type: Grant
    Filed: December 4, 2017
    Date of Patent: March 5, 2019
    Inventors: Adam Khan, Robert Polak, Priya Raman
  • Publication number: 20190064404
    Abstract: Disclosed herein is a broad band mirror system and method, wherein the system includes a mechanical substrate layer, a reflective metal layer on the mechanical substrate level, and a diamond layer, and the method includes the steps of selecting a sacrificial substrate layer, depositing a diamond layer on the substrate layer, smoothing a first surface of the diamond layer, depositing a reflective metal layer on the diamond layer, bonding a mechanical substrate to the diamond layer, removing the sacrificial substrate level, and smoothing a second diamond surface.
    Type: Application
    Filed: February 8, 2018
    Publication date: February 28, 2019
    Inventors: Ernest Schirmann, Priya Raman, Adam Khan, Robert Polak
  • Publication number: 20180159082
    Abstract: Disclosed herein is a transparent glass system that includes an optical grade silicon substrate, a transparent substrate layer; a titanium dioxide transparent layer, the transparent layer having an index of refraction of 2.35 or greater; and a polycrystalline diamond layer, wherein the transparent layer is between the substrate layer and the polycrystalline diamond layer.
    Type: Application
    Filed: December 4, 2017
    Publication date: June 7, 2018
    Inventors: Adam Khan, Robert Polak, Priya Raman
  • Publication number: 20180127871
    Abstract: Disclosed herein is a transparent glass system that includes an optical grade silicon substrate, and a nanocrystalline diamond film on the silicon substrate, the diamond film deposited using a chemical vapor deposition system having a reactor in which methane, hydrogen and argon source gases are added. Further disclosed is a method of fabricating transparent glass that includes the steps of seeding an optical grade silicon substrate and forming a nanocrystalline diamond film on the silicon substrate using a chemical vapor deposition system having a reactor in which methane, hydrogen and argon source gases are added.
    Type: Application
    Filed: August 9, 2017
    Publication date: May 10, 2018
    Inventors: Adam Khan, Robert Polak
  • Publication number: 20180068853
    Abstract: Disclosed herein is a new and improved system and method for fabricating diamond semiconductors. The system may include a diamond material having n-type donor atoms and a diamond lattice, wherein 0.16% of the donor atoms contribute conduction electrons with mobility greater than 770 cm2/Vs to the diamond lattice at 100 kPa and 300K. The method of fabricating diamond semiconductors may include the steps of selecting a diamond material having a diamond lattice; introducing a minimal amount of acceptor dopant atoms to the diamond lattice to create ion tracks; introducing substitutional dopant atoms to the diamond lattice through the ion tracks; and annealing the diamond lattice.
    Type: Application
    Filed: September 17, 2017
    Publication date: March 8, 2018
    Inventor: Adam Khan
  • Publication number: 20170372896
    Abstract: A method for coating a substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The plasma ball has a diameter. The plasma ball is disposed at a first distance from the substrate and the substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the substrate, and a diamond coating is deposited on the substrate. The diamond coating has a thickness. Furthermore, the diamond coating has an optical transparency of greater than about 80%. The diamond coating can include nanocrystalline diamond. The microwave plasma source can have a frequency of about 915 MHz.
    Type: Application
    Filed: August 14, 2017
    Publication date: December 28, 2017
    Inventors: Anirudha V. SUMANT, Adam KHAN
  • Publication number: 20170336537
    Abstract: A system and method for diamond based multilayer antireflective coating for optical windows are provided. An antireflective coatings for optical windows may include an optical grade silicon substrate, a first polycrystalline diamond film on the silicon substrate, a germanium film on the first polycrystalline diamond film, a fused silica film on the germanium film; and a second polycrystalline diamond film on the fused silica film. A method of fabricating a diamond based multilayer antireflective coating may include the steps of cleaning and seeding an optical substrate, forming a first diamond layer on the optical substrate, forming a germanium layer on the first diamond layer, forming a fused silica layer on the germanium layer, cleaning and seeding the germanium layer, and forming a second diamond layer on the germanium layer.
    Type: Application
    Filed: March 1, 2017
    Publication date: November 23, 2017
    Applicant: AKHAN SEMICONDUCTOR INC
    Inventors: Adam Khan, Robert Polak
  • Publication number: 20170269263
    Abstract: A system and method for diamond based multilayer antireflective coating for optical windows are provided. An antireflective coatings for optical windows may include an optical grade silicon substrate; a plurality of polycrystalline diamond films, a plurality of germanium films, and a plurality of fused silica films. A method of fabricating a diamond based multilayer antireflective coating may include the steps of cleaning and seeding an optical substrate, forming a plurality of diamond layers above the optical substrate, forming a plurality of germanium layers above the optical substrate; and forming a plurality of fused silica layers above the optical substrate, wherein the reflectance of the antireflective coating is between 0.1 and 3.0 percent for infrared spectrum wavelengths between 1800 and 5000 nanometers.
    Type: Application
    Filed: March 16, 2017
    Publication date: September 21, 2017
    Inventors: Adam Khan, Robert Polak
  • Patent number: 9741561
    Abstract: A method for coating a substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The plasma ball has a diameter. The plasma ball is disposed at a first distance from the substrate and the substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the substrate, and a diamond coating is deposited on the substrate. The diamond coating has a thickness. Furthermore, the diamond coating has an optical transparency of greater than about 80%. The diamond coating can include nanocrystalline diamond. The microwave plasma source can have a frequency of about 915 MHz.
    Type: Grant
    Filed: July 10, 2015
    Date of Patent: August 22, 2017
    Assignee: UCHICAGO ARGONNE, LLC
    Inventors: Anirudha V. Sumant, Adam Khan
  • Publication number: 20170236713
    Abstract: Disclosed herein is a new and improved system and method for fabricating monolithically integrated diamond semiconductor. The method may include the steps of seeding the surface of a substrate material, forming a diamond layer upon the surface of the substrate material; and forming a semiconductor layer within the diamond layer, wherein the diamond semiconductor of the semiconductor layer has n-type donor atoms and a diamond lattice, wherein the donor atoms contribute conduction electrons with mobility greater than 770 cm2/Vs to the diamond lattice at 100 kPa and 300K, and wherein the n-type donor atoms are introduced to the lattice through ion tracks.
    Type: Application
    Filed: January 13, 2017
    Publication date: August 17, 2017
    Inventor: Adam Khan
  • Publication number: 20170133226
    Abstract: Disclosed herein is a new and improved system and method for fabricating diamond semiconductors. The method may include the steps of selecting a diamond semiconductor material having a surface, exposing the surface to a source gas in an etching chamber, forming a carbide interface contact layer on the surface; and forming a metal layer on the interface layer.
    Type: Application
    Filed: October 6, 2016
    Publication date: May 11, 2017
    Inventor: Adam Khan
  • Publication number: 20170011914
    Abstract: A method for coating a substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The plasma ball has a diameter. The plasma ball is disposed at a first distance from the substrate and the substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the substrate, and a diamond coating is deposited on the substrate. The diamond coating has a thickness. Furthermore, the diamond coating has an optical transparency of greater than about 80%. The diamond coating can include nanocrystalline diamond. The microwave plasma source can have a frequency of about 915 MHz.
    Type: Application
    Filed: July 10, 2015
    Publication date: January 12, 2017
    Applicant: UCHICAGO ARGONNE, LLC
    Inventors: Anirudha V. Sumant, Adam Khan
  • Publication number: 20150295134
    Abstract: A system and method for transparent diamond semiconductor electronics are provided. The system may include a transparent substrate, a diamond active layer, a conductive layer, and an application that incorporates the transparent layer, the diamond layer, and the conductive layer. The method may include selecting a transparent substrate, creating a diamond material having a diamond lattice on the substrate, introducing acceptor dopant atoms to the diamond lattice to create ion tracks, introducing substitutional dopant atoms, annealing the diamond lattice, adding a conductive layer to the diamond lattice, and incorporating the substrate, and the diamond lattice, and the conductive layer into an application.
    Type: Application
    Filed: April 9, 2015
    Publication date: October 15, 2015
    Inventors: Adam Khan, Anirudha V. Sumant, Kostas Kostopolous
  • Publication number: 20150206749
    Abstract: Disclosed herein is a new and improved system and method for fabricating diamond semiconductors. The method may include the steps of selecting a diamond semiconductor material having a surface, exposing the surface to a source gas in an etching chamber, forming a carbide interface contact layer on the surface; and forming a metal layer on the interface layer.
    Type: Application
    Filed: January 13, 2015
    Publication date: July 23, 2015
    Inventor: Adam Khan
  • Patent number: 8933462
    Abstract: Disclosed herein is a new and improved system and method for fabricating diamond semiconductors. The method may include the steps of selecting a diamond semiconductor material having a surface, exposing the surface to a source gas in an etching chamber, forming a carbide interface contact layer on the surface; and forming a metal layer on the interface layer.
    Type: Grant
    Filed: December 21, 2012
    Date of Patent: January 13, 2015
    Assignee: AKHAN Semiconductor, Inc.
    Inventor: Adam Khan