Patents by Inventor Adam Patrick BATEMAN

Adam Patrick BATEMAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Autoclean for load locks in substrate processing systems
    Patent number: 12094739
    Abstract: A method for cleaning a load lock in a substrate processing system includes, in a first period, opening a first valve in fluid communication with a gas source to supply gas through a first vent into a gas volume of the load lock. The gas is supplied at a pressure and flow rate sufficient to disturb particles from surfaces of the load lock. The method includes, in a second period subsequent to the first period and with the first valve opened, opening a second valve in fluid communication with a pump and turning on the pump to flush the gas and particles from the gas volume of the load lock, and, in a third period subsequent to the second period, closing the first valve while continuing to pump the gas and the particles from the gas volume of the load lock via the second valve.
    Type: Grant
    Filed: October 5, 2020
    Date of Patent: September 17, 2024
    Assignee: Lam Research Corporation
    Inventors: Adam Patrick Bateman, Travis R. Taylor
  • AUTOCLEAN FOR LOAD LOCKS IN SUBSTRATE PROCESSING SYSTEMS
    Publication number: 20220375773
    Abstract: A method for cleaning a load lock in a substrate processing system includes, in a first period, opening a first valve in fluid communication with a gas source to supply gas through a first vent into a gas volume of the load lock. The gas is supplied at a pressure and flow rate sufficient to disturb particles from surfaces of the load lock. The method includes, in a second period subsequent to the first period and with the first valve opened, opening a second valve in fluid communication with a pump and turning on the pump to flush the gas and particles from the gas volume of the load lock, and, in a third period subsequent to the second period, closing the first valve while continuing to pump the gas and the particles from the gas volume of the load lock via the second valve.
    Type: Application
    Filed: October 5, 2020
    Publication date: November 24, 2022
    Inventors: Adam Patrick BATEMAN, Travis R. TAYLOR