Patents by Inventor Adam Rhoads

Adam Rhoads has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Feature-based defect detection
    Patent number: 6539106
    Abstract: Methods and apparatus are provided for inspecting a patterned substrate, comprising: preparing a reference image and a test image, extracting features from the reference image and extracting features from the test image, matching features of the reference image and features of the test image; and comparing features of the reference image and of the test image to identify defects. Embodiments include apparatus for inspecting patterned substrates, computer-readable media containing instructions for controlling a system having a processor for inspecting patterned substrates, and computer program products comprising a computer usable media having computer-readable program code embodied therein for controlling a system for inspecting patterned substrates. The images can be electron-beam voltage-contrast images.
    Type: Grant
    Filed: January 8, 1999
    Date of Patent: March 25, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Harry S. Gallarda, Chiwoei Wayne Lo, Adam Rhoads, Christopher G. Talbot