Abstract: A composite hard mask is disclosed that enables sub-100 nm sized MTJ cells to be formed for advanced devices such as spin torque MRAMs. The hard mask has a lower non-magnetic metallic layer such as Ru to magnetically isolate an overlying middle metallic spacer such as MnPt from an underlying free layer. The middle metallic spacer provides a height margin during subsequent processing to avoid shorting between a bit line and the MTJ cell in the final device. An upper conductive layer may be made of Ta and is thin enough to allow a MTJ pattern in a thin overlying photoresist layer to be transferred through the Ta during a fluorocarbon etch without consuming all of the photoresist. The MTJ pattern is transferred through the remaining hard mask layers and underlying MTJ stack of layers with a second etch step using a C, H, and O etch gas composition.

Abstract: An apparatus and a method for communication processing are disclosed. The apparatus includes a network connecting unit, a wireless connecting unit, and a processing unit. The network connecting unit is for use in connecting with internet and communicating a first communicating signal with the internet. The wireless connecting unit is for use in connecting with a portable communication device and communicating a second communicating signal with the portable communication device through a first communicating connection or a second communicating connection. The processing unit is used for converting the first communicating signal into the second communicating signal and vice versa. When a communication request is received by the communication processing apparatus, an available or a stable communicating connection can be established, such that the possible interruption of the communication can be avoided and the cost of communication is also reduced.