Patents by Inventor Adelbrecht Schorcht

Adelbrecht Schorcht has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Arrangement for the automatic adjustment of at least one object
    Patent number: 4496970
    Abstract: An arrangement for the automatic adjustment of at least one object, for instance a semiconductor disc and a template vis-a-vis a photoelectric measuring and scanning system, and of two objects in relation to each other in step-wise projection lithography for the manufacture of semiconductor structures.The purpose of this invention is to provide a highly accurate and at the same time quickly adjustable means for the adjustment of two objects, under the selective utilization of the different adjustment marks presently used, based on the thereby influenced light currents as well as their structure.An image of the adjustment marks of both objects is produced by means of an optical reproduction system in the scanning plane of a photoelectric measuring and scanning system, symmetrical to a stationary axis of this system.
    Type: Grant
    Filed: August 14, 1981
    Date of Patent: January 29, 1985
    Assignee: Jenoptik Jena G.m.b.H.
    Inventors: Adelbrecht Schorcht, Dietmar Klingenfeld, Reiner Hesse, Rainer Dastis, Volker Linz