Patents by Inventor Adithya Mokshagundam

Adithya Mokshagundam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for predicting software models using material-centric process instrumentation
    Publication number: 20010039462
    Abstract: A system and method for predicting software models used in chemical mechanical polishing (CMP) of workpieces using material-centric process instrumentation. One embodiment is a system which includes a feed forward loop for computing predictive calculations, a feed back loop for computing run-to-run calculations, a historical database which links together the feed forward and feed back loops, and a computational engine used to calculate new or adjusted CMP process parameters.
    Type: Application
    Filed: April 2, 2001
    Publication date: November 8, 2001
    Inventors: Rafael Mendez, Randy Smith, Matthew Weldon, Adithya Mokshagundam, David G. Wasinger