Patents by Inventor Adjan Gerrard Pieter Ivo SCHEERHOORN

Adjan Gerrard Pieter Ivo SCHEERHOORN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230332669
    Abstract: A vacuum system configured to mitigate damage or risk associated with a pump malfunction (e.g., an imbalance, a catastrophic failure, etc.). An exemplary vacuum pump includes a housing; a vibration isolator coupled to the vacuum pump housing and configured to isolate vibrations generated by the vacuum pump during operation; and a stop structure disposed between the vacuum pump housing and an adjacent fixture. The stop structure configured to prevent displacement of the vacuum pump housing relative to the fixture above a threshold amount, wherein the displacement of the vacuum pump housing is configured to be within the threshold amount during normal operation. The vacuum system may further include a collar configured to limit an axial displacement of the pump.
    Type: Application
    Filed: September 28, 2021
    Publication date: October 19, 2023
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Erheng WANG, Adrianus Marinus VERDONCK, Adjan Gerrard Pieter Ivo SCHEERHOORN, Xu WANG, Jianzi SUI, Chin-Fa TU, Martijn Petrus Christianus VAN HEUMEN