Abstract: A device for treating or acting on workpiece surfaces by means of an actuator, such as a cutting or engraving laser or a nozzle for applying oils, paints, adhesives, dyes, or etchants is disclosed. An ultrasonic levitation force field is generated by means of a sonotrode, which is coupled to the actuator into a working unit, such that the movably suspended working unit is supported on the workpiece surface in a hovering manner. The ultrasonic levitation force field allows a highly precise positioning of the working unit relative to the workpiece surface so as to allow a precise treatment or machining of the workpiece surface.

Abstract: A device for inspecting a workpiece surface includes a sensor, a sonotrode having a sound-emitting surface and rigidly connected to the sensor to form a sensor unit, and a movable positioning device coupled with the sensor unit to position the sensor unit in a position opposite to the workpiece surface. The positioning device includes a force-applying member to urge the sensor unit in a direction of the workpiece or strip material surface by applying a predefined urging force or using gravity as the urging force. The sound-emitting surface of the sonotrode generates ultrasonic oscillations to produce an ultrasonic levitation force field in the presence of a gaseous medium between the workpiece surface and the sound-emitting surface to thereby generate a counterforce in opposition to the urging force so that the sensor unit is held hovering at a distance to the workpiece or strip surface.

Abstract: A device for gripping a substrate without contact with which the substrate can be more securely transported. In the device, a housing cap has an air inlet in the upper surface and a lower opening, the lower opening communicating with the air inlet such that air introduced through the air inlet exits through the lower opening. A contour of the lower opening in its vertical cross section is convexly rounded such that the introduced air is guided along a horizontal undersurface of the housing cap. A nozzle is disposed in an inner hollow space of the housing cap, and has an inclined surface such that the width of the nozzle gradually decreases in the direction from the undersurface of the nozzle to the upper surface of the nozzle adjacent to the air inlet. The undersurface of the nozzle is at a predetermined distance from the inner surface of the housing cap. An ultrasonic shaker applies ultrasonic vibration to the housing cap.

Abstract: A device for inspecting a workpiece surface includes a sensor, a sonotrode having a sound-emitting surface and rigidly connected to the sensor to form a sensor unit, and a movable positioning device coupled with the sensor unit to position the sensor unit in a position opposite to the workpiece surface. The positioning device includes a force-applying member to urge the sensor unit in a direction of the workpiece or strip material surface by applying a predefined urging force or using gravity as the urging force. The sound-emitting surface of the sonotrode generates ultrasonic oscillations to produce an ultrasonic levitation force field in the presence of a gaseous medium between the workpiece surface and the sound-emitting surface to thereby generate a counterforce in opposition to the urging force so that the sensor unit is held hovering at a distance to the workpiece or strip surface.

Abstract: A device for treating or acting on workpiece surfaces by means of an actuator, such as a cutting or engraving laser or a nozzle for applying oils, paints, adhesives, dyes, or etchants is disclosed. An ultrasonic levitation force field is generated by means of a sonotrode, which is coupled to the actuator into a working unit, such that the movably suspended working unit is supported on the workpiece surface in a hovering manner. The ultrasonic levitation force field allows a highly precise positioning of the working unit relative to the workpiece surface so as to allow a precise treatment or machining of the workpiece surface.

Abstract: A vacuum gripper for gripping a work-piece includes a flat or curved gripper plate having at least one suction port. A work-piece suction throttling zone is formed around the suction port. The gripper plate has at least one recess provided at a side facing the work-piece and arranged beyond the work-piece suction throttling zone (6) formed around the suction port. At least one vent hole is formed within each of the recesses.

Abstract: A device for gripping a substrate without contact with which the substrate can be more securely transported. In the device, a housing cap has an air inlet in the upper surface and a lower opening, the lower opening communicating with the air inlet such that air introduced through the air inlet exits through the lower opening. A contour of the lower opening in its vertical cross section is convexly rounded such that the introduced air is guided along a horizontal undersurface of the housing cap. A nozzle is disposed in an inner hollow space of the housing cap, and has an inclined surface such that the width of the nozzle gradually decreases in the direction from the undersurface of the nozzle to the upper surface of the nozzle adjacent to the air inlet. The undersurface of the nozzle is at a predetermined distance from the inner surface of the housing cap. An ultrasonic shaker applies ultrasonic vibration to the housing cap.

Abstract: A vacuum gripper for gripping a work-piece includes a flat or curved gripper plate having at least one suction port. A work-piece suction throttling zone is formed around the suction port. The gripper plate has at least one recess provided at a side facing the work-piece and arranged beyond the work-piece suction throttling zone (6) formed around the suction port. At least one vent hole is formed within each of the recesses.

Abstract: The invention relates to a device for inspecting contact-sensitive planar materials or workpieces, e.g. wafers for the semiconductor industry, solar cells, glasses, FPD substrates, or biologically active substrates for biosensors, as well as materials having contact-sensitive curved surfaces. Said inspection device comprises a support element (1) for supporting a material (3) on the top face of the support element (1), at least one oscillator which is connected to the support element (1) and the oscillation frequency and amplitude of which are selected in such a way as to keep the material (3) hovering on the support element (1), and at least one optical sensor (4). The support element is made of a light-permeable material, and the optical sensor (4) is arranged below the support element (1).

Abstract: The present invention relates to a device for transporting and holding of touch-sensitive structural elements or materials, the device comprising the following features: At least an oscillatory plate-like take-up 2 for receiving the object to be transported or held, on which at least an oscillation generator 3 is fixed, and at least two supporting members 4, wherein the oscillation generator 3 is arranged on the plate-like take-up 2 at a predetermined position thereof to set the plate-like take-up into flexural vibrations, and the supporting members 4 are arranged at positions where the amplitude of the flexural vibration is lower than the maximum amplitude by at least 50%, and the oscillation generator 3 is operated with a frequency setting the plate-like take-up 2 into vibrations so that the structural elements or the material are (is) levitating in a contact-free way.

Abstract: The present invention relates to a method for loading and unloading a cassette which is used, for example, in plasma coating processes, wherein the following method steps are carried out: a. providing a cassette (1) which can be assembled and disassembled using a disassembly and assembly robot, b. automatic disassembling of the cassette such that the bottoms (2) of the cassette are separated from one another, c. transferring and associating the bottoms (2) to at least one automatic feeding apparatus which populates the bottoms (2) with workpieces to be processed, d. mounting the populated bottoms (2) to the cassette (1), e. transferring the cassette (1) to the process site where the process should be executed, f. executing the process, g. transferring the cassette (1) to the disassembly and assembly robot or to a further disassembly and assembly robot, h. disassembling the cassette in such a way that the bottoms (2) of the cassette are separated from one another, and i.

Abstract: The invention relates to a device for inspecting contact-sensitive planar materials or workpieces, e.g. wafers for the semiconductor industry, solar cells, glasses, FPD substrates, or biologically active substrates for biosensors, as well as materials having contact-sensitive curved surfaces. Said inspection device comprises a support element (1) for supporting a material (3) on the top face of the support element (1), at least one oscillator which is connected to the support element (1) and the oscillation frequency and amplitude of which are selected in such a way as to keep the material (3) hovering on the support element (1), and at least one optical sensor (4). The support element is made of a light-permeable material, and the optical sensor (4) is arranged below the support element (1).

Abstract: The invention relates to a device for inspecting contact-sensitive planar materials or workpieces, e.g. wafers for the semiconductor industry, solar cells, glasses, FPD substrates, or biologically active substrates for biosensors, as well as materials having contact-sensitive curved surfaces. Said inspection device comprises a support element (1) for supporting a material (3) on the top face of the support element (1), at least one oscillator which is connected to the support element (1) and the oscillation frequency and amplitude of which are selected in such a way as to keep the material (3) hovering on the support element (1), and at least one optical sensor (4). The support element is made of a light-permeable material, and the optical sensor (4) is arranged below the support element (1).

Abstract: The present invention relates to a vacuum gripper and in particular to a vacuum gripper for gently gripping work-pieces having sensitive surfaces, such as solar cells, wafers, or panels for flat screens, and for gripping heavy glass plates or plates made of other material having a very smooth surface that are stacked on top of each other and should be removed from above, wherein the vacuum gripper has the following characteristics: a straight or curved gripper plate (2), at least one suction opening (3; 3a), which is provided in the gripper plate (2), wherein a workpiece throttle surface (6) is formed around the suction opening (3), at least one recess (4), which is provided in the side of the gripper plate (2) facing the workpiece, outside of the workpiece throttle surface (6) relative to the suction opening (3), and at least one ventilation hole (5), which is provided within each recess (4).

Abstract: The present invention relates to a device for transporting and holding of touch-sensitive structural elements or materials, the device comprising the following features: At least an oscillatory plate-like take-up 2 for receiving the object to be transported or held, on which at least an oscillation generator 3 is fixed, and at least two supporting members 4, wherein the oscillation generator 3 is arranged on the plate-like take-up 2 at a predetermined position thereof to set the plate-like take-up into flexural vibrations, and the supporting members 4 are arranged at positions where the amplitude of the flexural vibration is lower than the maximum amplitude by at least 50%, and the oscillation generator 3 is operated with a frequency setting the plate-like take-up 2 into vibrations so that the structural elements or the material are (is) levitating in a contact-free way.

Abstract: A device for generating a floating state of an object by sound waves includes a rigid support structure having a top surface for absorbing forces generated by the gravitation or acceleration of the levitating object and perpendicularly acting on the top surface. A thin oscillatory element is arranged in parallel to the top surface. Further provided is a vibration generator for making the thin oscillatory element vibrating and levitating above the top surface so that the object is levitating above the thin oscillatory element without contacting it.

Abstract: A device for generating a floating state of an object by sound waves includes a rigid support structure having a top surface for absorbing forces generated by the gravitation or acceleration of the levitating object and perpendicularly acting on the top surface. A thin oscillatory element is arranged in parallel to the top surface. Further provided is a vibration generator for making the thin oscillatory element vibrating and levitating above the top surface so that the object is levitating above the thin oscillatory element without contacting it.

Abstract: In a device for conveying and positioning structural elements at a conveying track, a structural element is brought into pending state at the conveying track and the conveying track is tilted in conveying direction so that the structural element slides downwards to approach a target point. The position of the structural element is detected. The device further includes a control unit wherein the position of the structural element is detected within a predetermined range of the target point to be reached, and a time, at which the conveying track is tilted and re-tilted at a predetermined angular speed by a predetermined angle, is determined by using a calculation and control algorithm, so that the structural element is intercepted.

Abstract: The present invention relates to a device for conveying structural elements sensitive to touch along a conveying track in a non-contact way.