Patents by Inventor Adriaan Tip

Adriaan Tip has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EUV illumination system
    Patent number: 6410928
    Abstract: An EUV illumination system comprises an EUV radiation source unit (1) and at least one EUV radiation-reflecting mirror (10), which mirror comprises a multilayer structure of first layers (12) of a first material alternating with second layers (13) of a second material, and which radiation source unit comprises an electron source (2) for supplying an electron beam (EB) and a medium (3) which converts the electron beam into a beam of photons (IB). As the medium (3) comprises at least one material that is equal to one of the materials of the mirror multilayer structure, the photon beam (IB) has a relatively large intensity.
    Type: Grant
    Filed: December 14, 1999
    Date of Patent: June 25, 2002
    Assignee: Koninklijke Philips Electronics N.V.
    Inventors: Jan Verhoeven, Boris Lastdrager, Adriaan Tip, Dirk K. G. De Boer