Abstract: A method of determining a measurement recipe for measurement of in-die targets located within one or more die areas of an exposure field. The method includes obtaining first measurement data relating to measurement of a plurality of reference targets and second measurement data relating to measurement of a plurality of in-die targets, the targets having respective different overlay biases and measured using a plurality of different acquisition settings for acquiring the measurement data. One or more machine learning models are trained using the first measurement data to obtain a plurality of candidate measurement recipes, wherein the candidate measurement recipes include a plurality of combinations of a trained machine learned model and a corresponding acquisition setting; and a preferred measurement recipe is determined from the candidate measurement recipes using the second measurement data.

Abstract: A rotary cylindrical drying drum comprising in axial direction a series of vaned sections, with air and material passages, and in which material to be dried can enter each section via an annular slot disposed along the drum wall and be transported by the vanes in radial direction, and material transporting vanes on either side of each section disposed against the drum wall for axially transporting the material to be dried. According to the invention, each section (7) includes two double-walled, frusto-conical portions whose apices are directed towards one another, the apices of the outer cones (1) being interconnected to form an air and material passage (4), with the edges of the base circles being connected to the drum wall (8) and the inner cones 2 being connected to the outer cones (1) by means of spacers.

Abstract: Method and apparatus for drying mud or manure, which product, after passage through a mechanical dewatering device, is conducted through a thermal drying apparatus, whereby part of the product passed through the thermal drying apparatus is recycled by return and mixing with product passed through the dewatering device, prior to being introduced into the thermal drying apparatus, for obtaining a granular end product having grains of a desired size.