Abstract: A pixel structure, which forms one element of a focal plane array, includes a bolometer having a detector and an insulator. The detector that is made from a material that absorbs incident thermal radiation and has an electrical resistance that varies in response to changes in the temperature of the material. The insulator has a plurality of serpentine legs disposed completely underneath the detector so that the insulator extends between the detector and the substrate. And the insulator supports the detector in a spaced-apart relationship with respect to the substrate to thermally isolate the detector from the substrate. To further improve the performance of the bolometer, the bolometer includes a resonant layer between the detector and the insulator. The resonant layer is disposed such that areas defined between the detector and the resonant layer, and between the resonant layer and the insulator, form first and second resonant cavities, respectively.

Abstract: A pixel structure, which forms one element of a focal plane array, includes a bolometer having a detector and an insulator. The detector that is made from a material that absorbs incident thermal radiation and has an electrical resistance that varies in response to changes in the temperature of the material. The insulator has a plurality of serpentine legs disposed completely underneath the detector so that the insulator extends between the detector and the substrate. And the insulator supports the detector in a spaced-apart relationship with respect to the substrate to thermally isolate the detector from the substrate. To further improve the performance of the bolometer, the bolometer includes a resonant layer between the detector and the insulator. The resonant layer is disposed such that areas defined between the detector and the resonant layer, and between the resonant layer and the insulator, form first and second resonant cavities, respectively.

Abstract: A spatial light modulator including a silicon backplate having an insulating layer and a standoff grid of insulating material deposited on the backplate to define an array of cells. An electrode is deposited in each cell on said backplate. A thin membrane of doped silicon is mounted to the standoff grid and over said array of cells and electrodes. Mirrors are laid on the membrane to create an array of reflective pixels over the array of cells. When an electrode is selectively charged the portion of the membrane overlying that cell is deflected by electrostatic attraction between the membrane and the electrode. Taken overall, a pattern is assumed by the array of pixels which corresponds to the state of the electrical signals placed on the electrodes.

Abstract: A metallizing system for silicon surfaces consists solely of two layers of nickel and silver, respectively. Approximately 2 microns of the underlying silicon surface is removed prior to metallization to ensure removal of an oxygen-saturated layer of silicon before the nickel layer is deposited. The assembly is heated sufficiently that the nickel layer forms a nickel-silicide layer at the silicon surface. The metallizing adheres to the bare treated silicon but does not adhere to adjacent oxide coatings and easily lifts off of oxide-coated surfaces. The metallizing is solderable, makes ohmic contact to the silicon, regardless of its conductivity type and survives subsequent alloy processing temperatures.