Patents by Inventor Adrian Siegrist

Adrian Siegrist has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for detecting CMP endpoint in acidic slurries
    Patent number: 6899784
    Abstract: An apparatus for measuring ammonia gas concentration in an ongoing chemical mechanical polishing (CMP) cycle utilizing an acidic CMP slurry, having the following components: a. A transferring means to collect a sample of the acidic CMP slurry; b. A converting means to convert the acidic CMP slurry to a basic slurry; c. A measuring means to measure the ammonia gas present in the basic slurry; d. A detection means to signal the end of an ongoing CMP cycle.
    Type: Grant
    Filed: June 27, 2002
    Date of Patent: May 31, 2005
    Assignees: International Business Machines Corporation, EcoPhysics AG
    Inventors: Leping Li, Steven G. Barbee, Scott R. Cline, James A. Gilhooly, Walter Imfeld, Werner Moser, Adrian Siegrist, Heinz Stunzi, Xinhui Wang, Cong Wei