Patents by Inventor Adriana Sanchez

Adriana Sanchez has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for controlling a wafer polishing process
    Patent number: 6623333
    Abstract: A method is provided for controlling a wafer polishing process. The method includes determining a polishing characteristic for a particular type of device from a set of measurements obtained from a wafer having a device of the particular type, and updating the polishing characteristic in response to polishing and measuring a wafer having a device of the particular type. The method further includes determining the polish rate of a polisher using a set of measurements obtained from a wafer polished on the polisher; and updating the polish rate of the polisher in response to polishing a wafer on the polisher and measuring the wafer. The method also includes determining a desired polishing time on the polisher for a wafer having a device of the particular type using the updated polishing characteristic of the device and the updated polish rate of the polisher.
    Type: Grant
    Filed: November 9, 2000
    Date of Patent: September 23, 2003
    Assignee: Texas Instruments Incorporated
    Inventors: Nital S. Patel, Gregory A. Miller, Christopher D. Guinn, Adriana Sanchez