Patents by Inventor Adrianus Gerardus Bouwer

Adrianus Gerardus Bouwer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Positioning device and lithographic projection apparatus comprising such a device
    Patent number: 6337484
    Abstract: A positioning device comprising a first part and a second part which is displaceable relative to the first part by means of a system of Lorentz-force motors, whereby, relative to the first part, the second part is supported in a Z-direction by means of at least one gas cylinder, said gas cylinder comprising a housing having a pressure chamber, which housing is coupled to the first part; and a piston which is coupled to the second part and which can be displaced in the pressure chamber in the Z-direction, said piston being journaled relative to said housing substantially at right angles to the Z-direction.
    Type: Grant
    Filed: July 15, 1999
    Date of Patent: January 8, 2002
    Assignee: ASM Lithography, B.V.
    Inventors: Erik Roelof Loopstra, Adrianus Gerardus Bouwer, Henricus W. A. Janssen, Harmen Klaas Van Der Schoot