Patents by Inventor Adrianus Leonardus Gertrudus BOMMER

Adrianus Leonardus Gertrudus BOMMER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of controlling a radiation source and lithographic apparatus comprising the radiation source
    Patent number: 9645510
    Abstract: A method of selecting a periodic modulation to be applied to a variable of a radiation source, wherein the source delivers radiation for projection onto a substrate and wherein there is relative motion between the substrate and the radiation at a scan speed, the method including: for a set of system parameters and for a position on the substrate, calculating a quantity, the quantity being a measure of the contribution to an energy dose delivered to the position that arises from the modulation being applied to the variable of the source, wherein the contribution to the energy dose is calculated as a convolution of: a profile of radiation, and a contribution to an irradiance of radiation delivered by the source; and selecting a modulation frequency at which the quantity for the set of system parameters and the position on the substrate satisfies a certain criteria.
    Type: Grant
    Filed: April 16, 2014
    Date of Patent: May 9, 2017
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Wilhelmus Patrick Elisabeth Maria Op 'T Root, Adrianus Leonardus Gertrudus Bommer, Robert De Jong, Frank Everts, Herman Philip Godfried, Roland Pieter Stolk, Paul Van Der Veen
  • METHOD OF CONTROLLING A RADIATION SOURCE AND LITHOGRAPHIC APPARATUS COMPRISING THE RADIATION SOURCE
    Publication number: 20160070179
    Abstract: A method of selecting a periodic modulation to be applied to a variable of a radiation source, wherein the source delivers radiation for projection onto a substrate and wherein there is relative motion between the substrate and the radiation at a scan speed, the method including: for a set of system parameters and for a position on the substrate, calculating a quantity, the quantity being a measure of the contribution to an energy dose delivered to the position that arises from the modulation being applied to the variable of the source, wherein the contribution to the energy dose is calculated as a convolution of: a profile of radiation, and a contribution to an irradiance of radiation delivered by the source; and selecting a modulation frequency at which the quantity for the set of system parameters and the position on the substrate satisfies a certain criteria.
    Type: Application
    Filed: April 16, 2014
    Publication date: March 10, 2016
    Applicant: ASML Netherlands B.V.
    Inventors: Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Adrianus Leonardus Gertrudus BOMMER, Robert DE JONG, Frank EVERTS, Herman Philip GODFRIED, Roland Pieter STOLK, Paul VAN DER VEEN