Patents by Inventor Adrianus Mathijs Maria De Groof

Adrianus Mathijs Maria De Groof has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 7245357
    Abstract: A lithographic apparatus is disclosed. The lithographic apparatus includes an illumination system for providing a beam of radiation on a flat article to be placed in a beam path of the beam of radiation, and an article handler for handling the article during placement or removal of the article. The article handler includes an electrode and a dielectric layer in order to form an electrostatic clamp for electrostatically clamping the article.
    Type: Grant
    Filed: December 15, 2003
    Date of Patent: July 17, 2007
    Assignee: ASML Netherlands B.V.
    Inventors: Erwin Van Zwet, Jan Van Elp, Johannes Hubertus Josephina Moors, Hendrik Antony Johannes Neerhof, Joost Jeroen Ottens, Adrianus Mathijs Maria De Groof, Leo Wilhelmus Maria Kuipers, Peter Theodorus Maria Giesen, Marco Le Kluse