Patents by Inventor Adrianus Van Dijk

Adrianus Van Dijk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radiation exposure apparatus comprising a gas flushing system
    Publication number: 20060146300
    Abstract: An exposure apparatus is provided with a radiation source, a patterning structure, a projection system, a substrate, and a gas flushing system for removing gas from an area between the projection system and the substrate.
    Type: Application
    Filed: December 6, 2005
    Publication date: July 6, 2006
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Klaus Simon, Enno Van Den Brink, Gerardus Keijsers, Adrianus Van Dijk, Hubertus Baijens