Patents by Inventor Aernout ZONNEVYLLE

Aernout ZONNEVYLLE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for inspecting a sample using a plurality of charged particle beams
    Patent number: 10903042
    Abstract: Disclosed is an apparatus and method for inspecting a sample. The apparatus includes: a sample holder, a multi beam charged particle generator for generating an array of primary charged particle beams, an electro-magnetic lens system for directing the array of primary charged particle beams into an array of separate focused primary charged particle beams on the sample, a multi-pixel photon detector arranged for detecting photons created by the focused primary charged particle beams when the primary charged particle beams impinge on the sample or after transmission of the primary charged particle beams through the sample, and an optical assembly for conveying photons created by at least two adjacent focused primary charged particle beams of the array of separate focused primary charged particle beams to distinct and/or separate pixels or groups of pixels of the multi-pixel photon detector.
    Type: Grant
    Filed: October 3, 2019
    Date of Patent: January 26, 2021
    Inventors: Pieter Kruit, Aernout Zonnevylle, Yan Ren
  • Apparatus and method for inspecting a sample using a plurality of charged particle beams
    Publication number: 20200035447
    Abstract: Disclosed is an apparatus and method for inspecting a sample. The apparatus includes: a sample holder, a multi beam charged particle generator for generating an array of primary charged particle beams, an electro-magnetic lens system for directing the array of primary charged particle beams into an array of separate focused primary charged particle beams on the sample, a multi-pixel photon detector arranged for detecting photons created by the focused primary charged particle beams when the primary charged particle beams impinge on the sample or after transmission of the primary charged particle beams through the sample, and an optical assembly for conveying photons created by at least two adjacent focused primary charged particle beams of the array of separate focused primary charged particle beams to distinct and/or separate pixels or groups of pixels of the multi-pixel photon detector.
    Type: Application
    Filed: October 3, 2019
    Publication date: January 30, 2020
    Inventors: Pieter KRUIT, Aernout ZONNEVYLLE, Yan REN