Abstract: A radiating element of an antenna includes at least one wire-like nanostructure, each wire-like nanostructure extending in the same direction, called common direction, between a first end and a second end, and an inductor connected to each first end of a nanostructure, the inductor being formed from a first conductive material, the inductor extending in a plane normal to the common direction, the first conductive material having an electrical conductivity that varies under the effect of a variation of an electric field applied within the first conductive material.

Abstract: According to one aspect of the invention, there is proposed a capacitive radiofrequency MicroElectroMechanical System or capacitive RF MEMS comprising a metallic membrane suspended above an RF transmission line and resting on ground planes, and exhibiting a lower face, an upper face opposite to the lower face and a first layer comprising a refractory metallic material at least partially covering the upper face of the membrane so as to prevent the heating of the membrane.

Abstract: According to one aspect of the invention, there is proposed a capacitive radiofrequency MicroElectroMechanical System or capacitive RF MEMS comprising a metallic membrane suspended above an RF transmission line and resting on ground planes, and exhibiting a lower face, an upper face opposite to the lower face and a first layer comprising a refractory metallic material at least partially covering the upper face of the membrane so as to prevent the heating of the membrane.

Abstract: A passive radiofrequency microelectronic components for an integrated circuit which includes a dielectric substrate and at least one metal conductive layer positioned on said substrate. The conductive layer including at least one first metal conductive portion and a second metal conductive portion separated by an insulation. A microelectronic component according to the invention includes at least one graphene layer positioned so that a radiofrequency or hyperfrequency signal crosses said at least one graphene layer when it is transmitted between said first metal conductive portion and said second metal conductive portion, said graphene layer being able, when it is subject to an electric potential, to transmit said radiofrequency or hyperfrequency signal along a first direction and to attenuate said radiofrequency or hyperfrequency signal along a second direction opposite to said first direction.

Abstract: A passive radiofrequency microelectronic components for an integrated circuit which includes a dielectric substrate and at least one metal conductive layer positioned on said substrate. The conductive layer including at least one first metal conductive portion and a second metal conductive portion separated by an insulation. A microelectronic component according to the invention includes at least one graphene layer positioned so that a radiofrequency or hyperfrequency signal crosses said at least one graphene layer when it is transmitted between said first metal conductive portion and said second metal conductive portion, said graphene layer being able, when it is subject to an electric potential, to transmit said radiofrequency or hyperfrequency signal along a first direction and to attenuate said radiofrequency or hyperfrequency signal along a second direction opposite to said first direction.

Abstract: Methods of fabrication of electronic modules comprise, on the one hand, power electronic components fabricated on a substrate made of gallium nitride (GaN) and, on the other hand, micro-switches using electrostatic activation of the MEMS (Micro Electro Mechanical System) type. The electronic components and the micro-switches are fabricated on a single gallium nitride substrate and the fabrication method comprises at least the following steps: fabrication of the power components on the gallium nitride substrate; deposition of a first common passivation layer on said components and on the substrate; fabrication of the micro-switches on said substrate.

Abstract: The invention relates to an electrostatic actuation micro-switch of capacitor type composed of two plates, the first of which is a flexible membrane and the second of which comprises at least one control electrode, the two plates being separated by a thickness of vacuum or gas and at least one layer of at least one electrical insulating material situated on the control electrode characterized in that it furthermore comprises a charge drain consisting of oriented conducting nanotubes on the surface of the said electrode, the said drain being overlaid with the said layer of electrical insulating material. The subject of the invention is also a method for fabricating the micro-switch according to the invention.

Abstract: Methods of fabrication of electronic modules comprise, on the one hand, power electronic components fabricated on a substrate made of gallium nitride (GaN) and, on the other hand, micro-switches using electrostatic activation of the MEMS (Micro Electro Mechanical System) type. The electronic components and the micro-switches are fabricated on a single gallium nitride substrate and the fabrication method comprises at least the following steps: fabrication of the power components on the gallium nitride substrate; deposition of a first common passivation layer on said components and on the substrate; fabrication of the micro-switches on said substrate.

Abstract: The invention relates to an RF circulator device with n ports allowing an RF signal to circulate in a single direction, where the circulator has at least three ports, an input port for receiving a radio frequency signal to be transmitted to a second port designed to be connected to an antenna port, an output port capable of being connected to a receiving device or a load, comprising a first and a second microswitches each comprising two armatures of which the first is a flexible membrane and the second comprises at least one zone of a signal line, both armatures being separated by a thickness of void or of gas, the device making it possible to connect the main line to ground planes by self-actuation of the membrane under the effect of an input signal power.

Abstract: A circulator with at least three ports (p1, p2, p3) comprises two identical electromechanical micro-switches of the series type (MEMS1, MEMS2) formed on the same substrate, a first micro-switch being disposed in order to allow the transmission of a radiofrequency or microwave signal from an input port (p1) to a port (p2) designed to be connected to an antenna, a second micro-switch being disposed in order to allow the signal transmission between the port (p2) designed to be connected to an antenna and said output port. Application to a radiofrequency or microwave telecommunications system.

Abstract: The subject of the invention is an anti-intrusion system for protecting electronic components (3) including a substrate (2) on which the electronic components are placed. A conducting enclosure (1) encapsulates the electronic components on the surface of the substrate (2). The system also includes a warning device. The system includes a transmitting antenna on the surface of the substrate (2), and a capacitive electromechanical microswitch. The microswitch is linked to the warning device by a signal line, so as to be able to activate it.

Abstract: The micro-switch structure comprises, on a substrate 1 coated with a passivation layer 2, a first signal line LS-IN and a second signal line LS-OUT disposed in the projected extension of one another, separated by a switching region 10; a control electrode 3 in said region, a dielectric material 4 with high relative permittivity invariant in frequency, disposed on the control electrode in such a manner that, between the two signal lines, the control electrode is wider on either side and, in the orthogonal direction, the dielectric protrudes on either side of the control electrode and rests on the passivation layer; parallel ground lines, disposed symmetrically on either side of the signal lines and formed on a topological level separated from that of the signal lines by at least one insulating layer made of a material different from that of the passivation layer.

Abstract: The invention relates to an electrostatic actuation micro-switch of capacitor type composed of two plates, the first of which is a flexible membrane and the second of which comprises at least one control electrode, the two plates being separated by a thickness of vacuum or gas and at least one layer of at least one electrical insulating material situated on the control electrode characterized in that it furthermore comprises a charge drain consisting of oriented conducting nanotubes on the surface of the said electrode, the said drain being overlaid with the said layer of electrical insulating material. The subject of the invention is also a method for fabricating the micro-switch according to the invention.

Abstract: A switched capacitor is characterized in that it comprises a series MEMS-type switch, the capacitor to be switched being integrated into the structure of the MEMS switch and being formed by an additional metal layer produced on part of the dielectric layer of the MEMS switch, the capacitance of the switched capacitor being set as a function of the area of the metal layer.

Abstract: The invention relates to a circulator with at least three ports (p1, p2, p3), an input port (p1) for receiving a radio frequency signal to be transmitted to a port (p2) designed to be connected to a transmit/receive antenna (A) called the antenna port, an output port (p3) capable of being connected to a receiving device or a load, characterized in that it comprises: a first and a second microswitches (MEMS1, MEMS2) with electrostatic actuation of the capacitor type formed on one and the same substrate and each comprising two armatures of which the first is a flexible membrane and the second comprises at least one zone of a signal line, both armatures being separated by a thickness of void or of gas; the antenna and output ports being placed on a main signal line, the input port being situated on a secondary signal line; the first microswitch being placed so as to connect the main signal line and the secondary signal line by self-actuation of the membrane under the effect of an input signal power; the secon

Abstract: The micro-switch structure comprises, on a substrate 1 coated with a passivation layer 2, a first signal line LS-IN and a second signal line LS-OUT disposed in the projected extension of one another, separated by a switching region 10; a control electrode 3 in said region, a dielectric material 4 with high relative permittivity invariant in frequency, disposed on the control electrode in such a manner that, between the two signal lines, the control electrode is wider on either side and, in the orthogonal direction, the dielectric protrudes on either side of the control electrode and rests on the passivation layer; parallel ground lines, disposed symmetrically on either side of the signal lines and formed on a topological level separated from that of the signal lines by at least one insulating layer made of a material different from that of the passivation layer.

Abstract: A circulator with at least three ports (p1, p2, p3) comprises two identical electromechanical micro-switches of the series type (MEMS1, MEMS2) formed on the same substrate, a first micro-switch being disposed in order to allow the transmission of a radiofrequency or microwave signal from an input port (p1) to a port (p2) designed to be connected to an antenna, a second micro-switch being disposed in order to allow the signal transmission between the port (p2) designed to be connected to an antenna and said output port. Application to a radiofrequency or microwave telecommunications system.

Abstract: The subject of the invention is an anti-intrusion system for protecting electronic components (3) including a substrate (2) on which the electronic components are placed. A conducting enclosure (1) encapsulates the electronic components on the surface of the substrate (2). The system also includes a warning device. The system includes a transmitting antenna on the surface of the substrate (2), and a capacitive electromechanical microswitch. The microswitch is linked to the warning device by a signal line, so as to be able to activate it.

Abstract: The field of the invention is that of microsystems of the electrostatically actuated microswitch type that are used in electronics to carry out switching functions, especially in the microwave field for mobile telephony and radars. The object of the invention is to improve the performance of the switch by reducing the response time of the device and by increasing the radiofrequency or microwave power supported, while still maintaining low switching voltages. This improved performance is obtained by using thick membranes and by placing a material of high relative permittivity between said membrane and the associated electrode. The switch is obtained by a novel production process, the membrane being produced on an independent substrate and then joined to the base substrate of the switch. Examples of processes for producing devices according to the invention with the materials that can be used, the possible geometries and the various production steps are given.

Abstract: The invention relates to phase-shifting cells constituting the passive reflectarrays of antennas with a reconfigurable transmission direction, transmitting in the microwave range. More particularly, the invention describes, within the context of phase-shifting cells of the type having dipole strands angularly distributed in a star configuration, a novel type of switch consisting of a microelectromechanical device essentially comprising a suspended micromembrane which, under the action of an electrostatic force caused by a control voltage, deforms sufficiently to ensure electrical connection between the strands, making it possible to form a dipole in the desired orientation. In one particular embodiment, the micromembrane can be likened to one of the plates of a capacitor and its deformation corresponds to a substantial increase in the capacitance of this capacitor, thus providing the electrical connection.