Abstract: What is suggested is a micromembrane pumping device for pumping a fluid, having: a pump chamber to which an inlet valve, an outlet valve, and a membrane device for varying a volume of the pump chamber are associated, wherein the membrane device has a plate-shaped actuator for deforming the membrane device; and influencing means for influencing the plate-shaped actuator and the volume of the pump chamber; wherein the membrane device has a plate-shaped membrane body limiting the pump chamber; wherein the plate-shaped actuator is arranged on a side of the plate-shaped membrane body facing away from the pump chamber; wherein the plate-shaped actuator is mounted to and electrically insulated from the plate-shaped membrane body by an electrically insulating glue layer; wherein at least one embedded portion of a support body at or in which a deformation sensor for detecting a deformation of the membrane device is arranged, is arranged within the glue layer to detect the volume of the pump chamber; wherein the influe

Abstract: According to an embodiment, a sensor arrangement comprises a first micropump, e.g. a microfluidic or peristaltic pump, having a normally closed (NC) safety valve, e.g. at the micropump output, a second micropump, e.g. microfluidic or peristaltic pump, having a normally closed (NC) safety valve, e.g. at the micropump output, and a sensor having a sensor chamber, e.g. a sensor cavity or sensor volume, with a sensor element, e.g. an active sensitive region or layer, in the sensor chamber, wherein the sensor is configured to provide a sensor output signal based on a condition of the fluid, e.g. a gas or liquid, in the sensor chamber. The sensor chamber of the sensor is fluidically coupled between the first and second micropump, and the first and second micropump are configured to provide a defined operation mode of the sensor arrangement based on the respective activation or operation condition of the first and second micropump for providing (1.) a defined negative fluid pressure in the sensor chamber, (2.

Abstract: According to an embodiment, a sensor arrangement comprises a first micropump, e.g. a microfluidic or peristaltic pump, having a normally closed (NC) safety valve, e.g. at the micropump output, a second micropump, e.g. microfluidic or peristaltic pump, having a normally closed (NC) safety valve, e.g. at the micropump output, and a sensor having a sensor chamber, e.g. a sensor cavity or sensor volume, with a sensor element, e.g. an active sensitive region or layer, in the sensor chamber, wherein the sensor is configured to provide a sensor output signal based on a condition of the fluid, e.g. a gas or liquid, in the sensor chamber. The sensor chamber of the sensor is fluidically coupled between the first and second micropump, and the first and second micropump are configured to provide a defined operation mode of the sensor arrangement based on the respective activation or operation condition of the first and second micropump for providing (1.) a defined negative fluid pressure in the sensor chamber, (2.