Patents by Inventor Agnes Verbist

Agnes Verbist has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for producing micromachined devices and devices obtained thereof
    Patent number: 6740542
    Abstract: The present invention is related to a method for producing micromachined devices for use in Microelectromechanical Systems (MEMS), comprising the steps of providing a crystalline wafer, and processing from said wafer at least one micromachined device comprising at least one elongated opening and/or cavity, having a longitudinal axis, so that said longitudinal axis is at an angle to a direction which lies along the intersection of the front plane of the wafer and a cleavage plane, said cleavage plane being defined as a plane along which cleavage of the wafer is most likely to occur.
    Type: Grant
    Filed: October 9, 2001
    Date of Patent: May 25, 2004
    Assignees: Interuniversitair Microelektronica Centrum, Eastman Kodak Company
    Inventors: Ann Witvrouw, Atze de Vries, Piet De Moor, Luc Haspeslagh, Brigitte Parmentier, Agnes Verbist, Constantine Anagnostopoulos
  • Method for producing micromachined devices and devices obtained thereof
    Publication number: 20020108926
    Abstract: The present invention is related to a method for producing micromachined devices for use in Microelectromechanical Systems (MEMS), comprising the steps of providing a crystalline wafer, and processing from said wafer at least one micromachined device comprising at least one elongated opening and/or cavity, having a longitudinal axis, so that said longitudinal axis is at an angle to a direction which lies along the intersection of the front plane of the wafer and a cleavage plane, said cleavage plane being defined as a plane along which cleavage of the wafer is most likely to occur.
    Type: Application
    Filed: October 9, 2001
    Publication date: August 15, 2002
    Inventors: Ann Witvrouw, Atze de Vries, Piet De Moor, Luc Haspeslagh, Brigitte Parmentier, Agnes Verbist, Constantine Anagnostopoulos