Patents by Inventor Ahmed M. El-Masry

Ahmed M. El-Masry has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Magnetically enhanced RIE process and apparatus
    Patent number: 4983253
    Abstract: An etching process and apparatus employ a novel magnetic enhancement means and a substantially pure molecular bromine plasma in order to perform in a desired manner for a number of important applications requiring etching of single-crystal and polycrystalline silicon.
    Type: Grant
    Filed: May 27, 1988
    Date of Patent: January 8, 1991
    Assignee: University of Houston-University Park
    Inventors: John C. Wolfe, Ahmed M. El-Masry, Fu-On Fong