Abstract: Systems and methods are provided for adjusting a fluid dispenser for depositing drops of formable material. According to embodiments, a system obtains an image of a substrate including a film formed on the substrate by curing the formable material deposited by a first dispenser and a second dispenser. Intensity information is obtained for pixels of the image and a difference is determined between intensity values from a portion of the substrate on which the first dispenser deposited drops and intensity values from a portion on which the second dispenser deposited drops, the intensity values corresponding to a region of the substrate associated with a target thickness. Adjustments based on the intensity values are made to change a drop volume and a drop density for nozzles of the first dispenser and nozzles of the second dispenser.

Abstract: Some devices, systems, and methods calculate a transition region periodicity as a least a common multiple of a first periodicity of a first uniform-feature segment and a second periodicity of a second uniform-feature segment; determine a plurality of periodic elements of the transition region based on the transition region periodicity; determine a number of drops for each periodic element of the plurality of periodic elements of the transition region based on a volume requirement of the periodic element; and select, for each periodic element of the plurality of periodic elements of the transition region, a transition-region drop pattern that has the number of drops and that minimizes a metric that is a weighted sum of inverse distances between drops in the periodic element and drops in the first uniform-feature segment and the second uniform-feature segment that are adjacent to the periodic element.

Abstract: Some devices, systems, and methods receive a production-system description that describes respective operations that can be performed on workpieces by each of a plurality of machines and that describes capabilities of one or more robots to transfer the workpieces to and from each of the plurality of machines; receive a process description that describes at least one sequence of process operations to be performed on a workpiece; construct a plurality of transfer chains by recursively generating transfer chains based on a production-system state, the process description, and on the production-system description; and select a particular transfer chain of the plurality of transfer chains based on one or more selection criteria.

Abstract: A base drop pattern (BDP) is generated based on at least one of input parameters. A segment required compensation volume (RCV) of edge segments near edges of the imprint field is estimated. Edge drop arrangements at the edge segments are generated based on the estimated segment RCV and a guide command from a user.

Abstract: Some devices, systems, and methods calculate a transition region periodicity as a least a common multiple of a first periodicity of a first uniform-feature segment and a second periodicity of a second uniform-feature segment; determine a plurality of periodic elements of the transition region based on the transition region periodicity; determine a number of drops for each periodic element of the plurality of periodic elements of the transition region based on a volume requirement of the periodic element; and select, for each periodic element of the plurality of periodic elements of the transition region, a transition-region drop pattern that has the number of drops and that minimizes a metric that is a weighted sum of inverse distances between drops in the periodic element and drops in the first uniform-feature segment and the second uniform-feature segment that are adjacent to the periodic element.

Abstract: N whole substrate drop patterns are generated. Each of the N whole substrate drop pattern has M repeating drop patterns in repeating evaluation regions of a test substrate with predetermined dimensions and corresponding to a film to be formed from each of the N whole substrate drop patterns on test substrate. P statistical parameters of Q distributions of physical attributes of the M repeating drop patterns are calculated. The Q physical attributes are related to a thickness of a top layer of the film above substrate features. N figures of merit from the P statistical parameters corresponding to the N whole substrate drop patterns are determined. From the N whole substrate drop patterns, a satisfactory drop pattern that has a satisfactory figure of merit is selected among the N figures of merit. N, M, P, and Q are positive integers.

Abstract: A base drop pattern (BDP) is generated based on at least one of input parameters. A segment required compensation volume (RCV) of edge segments near edges of the imprint field is estimated. Edge drop arrangements at the edge segments are generated based on the estimated segment RCV and a guide command from a user.

Abstract: Some devices, systems, and methods obtain one or more images of a substrate, wherein the substrate includes a feature pattern; determine one or more edges of the feature pattern based on the one or more images; determine an offset of the feature pattern relative to the substrate and an angle of the feature pattern relative to the substrate based on the one or more edges of the feature pattern; and generate a transformation for a drop pattern based on the offset of the feature pattern and on the angle of the feature pattern.

Abstract: Some devices, systems, and methods obtain a material map of a region; divide the region into a plurality of subregions; perform, for each of one or more subregions of the plurality of subregions, a first drop-pattern-generation process, wherein the first drop-pattern-generation process generates a respective initial drop pattern for the subregion based on the material map; and perform, for each of the one or more subregions of the plurality of subregions, a second drop-pattern-generation process, wherein the second drop-pattern-generation process generates a respective revised drop pattern for the subregion based on the material map and on the respective initial drop pattern for the subregion.

Abstract: Devices, systems, and methods (a) receive a predetermined fluid drop volume and an array of cells, wherein each cell in the array is associated with a respective predetermined fluid volume; (b) scan the array of cells according to a scanning sequence for a next unassigned cell and add the next unassigned cell to a respective fill set; (c) add unassigned cells neighboring the next unassigned cell to the respective fill set until an aggregate of the respective predetermined fluid volumes of the cells in the respective fill set equals or exceeds the predetermined fluid drop volume; (d) place a fluid drop in the drop pattern within an area associated with the respective fill set and mark all cells in the respective fill set as assigned; and (e) repeat (b)-(d) until all cells in the array of cells have been assigned and the drop pattern has been generated.

Abstract: Some devices, systems, and methods obtain a material map of a region; divide the region into a plurality of subregions; perform, for each of one or more subregions of the plurality of subregions, a first drop-pattern-generation process, wherein the first drop-pattern-generation process generates a respective initial drop pattern for the subregion based on the material map; and perform, for each of the one or more subregions of the plurality of subregions, a second drop-pattern-generation process, wherein the second drop-pattern-generation process generates a respective revised drop pattern for the subregion based on the material map and on the respective initial drop pattern for the subregion.

Abstract: Devices, systems, and methods (a) receive a field material map that represents of a spatial distribution of a volume of a material over a rectangular region; (b) divide the rectangular region into two rectangular child regions along a division axis; (c) determine if the material volume in each rectangular child region is within a range of a specific volume; (d) for each rectangular child region that is not within the range of the specific volume, perform (b) for each rectangular child region as the rectangular region along a division axis that has been rotated by 90 degrees relative to the division axis that was used to generate the rectangular child region; (e) repeat (b)-(d) until all rectangular child regions meet the criteria in (c); and (f) output a drop pattern that includes one or more drop locations inside each rectangular child region that meets the criteria in (c).

Abstract: A nanofabrication method comprises receiving information regarding a distortion within an imprint system, generating a first drop pattern that is not based on the received information, generating a second drop pattern and a third drop pattern, each based on the received information, modifying the first drop pattern to generate a fourth drop pattern. The modifying includes adding a first plurality of drop positions to the first drop pattern or removing a second plurality of drop positions from the first drop pattern, thereby forming an intermediate drop pattern, and either removing the second plurality of drop positions from the intermediate drop pattern or adding the first plurality of drops to the intermediate pattern. The first plurality of drop positions corresponds to drop positions defined by the second drop pattern and the second plurality of drop positions corresponds to drop positions defined by the third drop pattern.

Abstract: Devices, systems, and methods (a) receive a field material map that represents of a spatial distribution of a volume of a material over a rectangular region; (b) divide the rectangular region into two rectangular child regions along a division axis; (c) determine if the material volume in each rectangular child region is within a range of a specific volume; (d) for each rectangular child region that is not within the range of the specific volume, perform (b) for each rectangular child region as the rectangular region along a division axis that has been rotated by 90 degrees relative to the division axis that was used to generate the rectangular child region; (e) repeat (b)-(d) until all rectangular child regions meet the criteria in (c); and (f) output a drop pattern that includes one or more drop locations inside each rectangular child region that meets the criteria in (c).

Abstract: A nanofabrication method comprises receiving information regarding a distortion within an imprint system, generating a first drop pattern that is not based on the received information, generating a second drop pattern and a third drop pattern, each based on the received information, modifying the first drop pattern to generate a fourth drop pattern. The modifying includes adding a first plurality of drop positions to the first drop pattern or removing a second plurality of drop positions from the first drop pattern, thereby forming an intermediate drop pattern, and either removing the second plurality of drop positions from the intermediate drop pattern or adding the first plurality of drops to the intermediate pattern. The first plurality of drop positions corresponds to drop positions defined by the second drop pattern and the second plurality of drop positions corresponds to drop positions defined by the third drop pattern.

Abstract: Devices, systems, and methods (a) receive a predetermined fluid drop volume and an array of cells, wherein each cell in the array is associated with a respective predetermined fluid volume; (b) scan the array of cells according to a scanning sequence for a next unassigned cell and add the next unassigned cell to a respective fill set; (c) add unassigned cells neighboring the next unassigned cell to the respective fill set until an aggregate of the respective predetermined fluid volumes of the cells in the respective fill set equals or exceeds the predetermined fluid drop volume; (d) place a fluid drop in the drop pattern within an area associated with the respective fill set and mark all cells in the respective fill set as assigned; and (e) repeat (b)-(d) until all cells in the array of cells have been assigned and the drop pattern has been generated.