Patents by Inventor Ahreum CHOI

Ahreum CHOI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polymers for hard masks, hard mask compositions including the same, and methods for forming a pattern of a semiconductor device using a hard mask composition
    Patent number: 9676892
    Abstract: The present inventive concepts relate to a polymer for a hard mask, a hard mask composition including a polymer for a hard mask as described herein, and a method for forming a pattern of a semiconductor device using a hard mask composition as described herein. The polymer includes a structure represented by the following chemical formula 1. In chemical formula 1, “A”, “Q”, “L”, “R1”, “R2”, “R3”, and “n” are the same as defined in the specification.
    Type: Grant
    Filed: March 9, 2016
    Date of Patent: June 13, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Myeong koo Kim, Ahreum Choi, Boodeuk Kim, Songse Yi, Jungsik Choi
  • POLYMERS FOR HARD MASKS, HARD MASK COMPOSITIONS INCLUDING THE SAME, AND METHODS FOR FORMING A PATTERN OF A SEMICONDUCTOR DEVICE USING A HARD MASK COMPOSITION
    Publication number: 20160266494
    Abstract: The present inventive concepts relate to a polymer for a hard mask, a hard mask composition including a polymer for a hard mask as described herein, and a method for forming a pattern of a semiconductor device using a hard mask composition as described herein. The polymer includes a structure represented by the following chemical formula 1. In chemical formula 1, “A”, “Q”, “L”, “R1”, “R2”, “R3”, and “n” are the same as defined in the specification.
    Type: Application
    Filed: March 9, 2016
    Publication date: September 15, 2016
    Inventors: Myeong koo Kim, Ahreum CHOI, BOODEUK KIM, SONGSE YI, JUNGSIK CHOI