Patents by Inventor Aiko KINO

Aiko KINO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170210958
    Abstract: A CMP polishing liquid for polishing an insulating material, comprising a cerium oxide particle satisfying the conditions (A) and (B) below, a 4-pyrone-based compound, and water: condition (A): an average particle diameter R of the cerium oxide particle is 50 nm or more and 300 nm or less, and condition (B): when the cerium oxide particle is defined as a spherical particle having the average particle diameter R, sphericity S2/S1 provided by a specific surface area S1 of the spherical particle and a specific surface area S2 of the cerium oxide particle measured by the BET method is 3.15 or less.
    Type: Application
    Filed: July 3, 2015
    Publication date: July 27, 2017
    Inventors: Takashi SHINODA, Munehiro OOTA, Nao YAMAMURA, Aiko KINO