Patents by Inventor Aiwu Yue

Aiwu Yue has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MEMS enhanced capacitive pick-off and electrostatic rebalance electrode placement
    Patent number: 6841992
    Abstract: A Micro Electro-Mechanical System (MEMS) acceleration sensing device, formed of a sensing element having first and second substantially planar and parallel spaced apart opposing surfaces and being suspended for pendulous motion about a hinge axis oriented along a minor axis of the sensing element; and one or more substrates each having a face spaced from one of the opposing surfaces of the sensing element, each of the substrates having pluralities of electrodes arranged substantially crosswise to the hinge axis of the sensing element symmetrically to a longitudinal axis of the sensing device and forming respective first and second capacitors with the moveable sensing element. Each of the one or more substrates optionally including a clearance relief for extending the rotational range of motion of the sensing element.
    Type: Grant
    Filed: February 18, 2003
    Date of Patent: January 11, 2005
    Assignee: Honeywell International, Inc.
    Inventors: Aiwu Yue, Ronald B. Leonardson
  • MEMS enhanced capacitive pick-off and electrostatic rebalance electrode placement
    Publication number: 20040160232
    Abstract: A Micro Electro-Mechanical System (MEMS) acceleration sensing device, formed of a sensing element having first and second substantially planar and parallel spaced apart opposing surfaces and being suspended for pendulous motion about a hinge axis oriented along a minor axis of the sensing element; and one or more substrates each having a face spaced from one of the opposing surfaces of the sensing element, each of the substrates having pluralities of electrodes arranged substantially crosswise to the hinge axis of the sensing element symmetrically to a longitudinal axis of the sensing device and forming respective first and second capacitors with the moveable sensing element. Each of the one or more substrates optionally including a clearance relief for extending the rotational range of motion of the sensing element.
    Type: Application
    Filed: February 18, 2003
    Publication date: August 19, 2004
    Applicant: Honeywell International, Inc.
    Inventors: Aiwu Yue, Ronald B. Leonardson