Patents by Inventor Ajay Sampath BHOOLOKAM

Ajay Sampath BHOOLOKAM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of coating a substrate and coating apparatus for coating a substrate
    Patent number: 11624110
    Abstract: According to one aspect of the present disclosure, a method of coating a substrate (100) with at least one cathode assembly (10) having a sputter target (20) and a magnet assembly (25) that is rotatable around a rotation axis (A) is provided. The method comprises: Coating of the substrate (100) while moving the magnet assembly in a reciprocating manner in a first angular sector (12); and subsequent coating of the substrate (100) while moving the magnet assembly (25) in a reciprocating manner in a second angular sector (14) different from the first angular sector (12). According to a second aspect, a coating apparatus for performing said method is provided.
    Type: Grant
    Filed: August 2, 2021
    Date of Patent: April 11, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Hyun Chan Park, Thomas Gebele, Ajay Sampath Bhoolokam
  • METHOD OF COATING A SUBSTRATE AND COATING APPARATUS FOR COATING A SUBSTRATE
    Publication number: 20210355578
    Abstract: According to one aspect of the present disclosure, a method of coating a substrate (100) with at least one cathode assembly (10) having a sputter target (20) and a magnet assembly (25) that is rotatable around a rotation axis (A) is provided. The method comprises: Coating of the substrate (100) while moving the magnet assembly in a reciprocating manner in a first angular sector (12); and subsequent coating of the substrate (100) while moving the magnet assembly (25) in a reciprocating manner in a second angular sector (14) different from the first angular sector (12). According to a second aspect, a coating apparatus for performing said method is provided.
    Type: Application
    Filed: August 2, 2021
    Publication date: November 18, 2021
    Inventors: Hyun Chan PARK, Thomas GEBELE, Ajay Sampath BHOOLOKAM
  • Method of coating a substrate and coating apparatus for coating a substrate
    Patent number: 11118261
    Abstract: According to one aspect of the present disclosure, a method of coating a substrate with at least one cathode assembly having a sputter target and a magnet assembly that is rotatable around a rotation axis is provided. The method comprises: Coating of the substrate while moving the magnet assembly in a reciprocating manner in a first angular sector; and subsequent coating of the substrate while moving the magnet assembly in a reciprocating manner in a second angular sector different from the first angular sector. According to a second aspect, a coating apparatus for performing said method is provided.
    Type: Grant
    Filed: May 2, 2016
    Date of Patent: September 14, 2021
    Assignee: Applied Materials, Inc.
    Inventors: Hyun Chan Park, Thomas Gebele, Ajay Sampath Bhoolokam
  • METHOD OF COATING A SUBSTRATE AND COATING APPARATUS FOR COATING A SUBSTRATE
    Publication number: 20190161852
    Abstract: According to one aspect of the present disclosure, a method of coating a substrate with at least one cathode assembly having a sputter target and a magnet assembly that is rotatable around a rotation axis is provided. The method comprises: Coating of the substrate while moving the magnet assembly in a reciprocating manner in a first angular sector; and subsequent coating of the substrate while moving the magnet assembly in a reciprocating manner in a second angular sector different from the first angular sector. According to a second aspect, a coating apparatus for performing said method is provided.
    Type: Application
    Filed: May 2, 2016
    Publication date: May 30, 2019
    Inventors: Hyun Chan PARK, Thomas GEBELE, Ajay Sampath BHOOLOKAM