Abstract: A wire bonding apparatus, comprising a bonding tool mounted on a bondhead body which is in turn mounted on a positioning table, is provided for bonding electronic devices. The positioning table has first and second motors coupled to it that are operative to drive the bondhead body to positions along respective first and second orthogonal axes. The bondhead body is connected to the positioning table through a pivot such that the bondhead body is rotatable relative to the positioning table about a third axis which is substantially orthogonal to the first and second axes. Further, a third motor drives the bondhead body to rotate about the third axis.

Abstract: A gantry system is provided that comprises a gantry beam having a first section and a second section and first and second motors cooperating to drive the respective first and second sections in parallel directions to position the gantry beam along a linear axis. A flexure is connected between the first and second sections about which the second section is deflectable relative to the first section, which is advantageous to reduce any stresses that may be caused in the gantry system when driving the gantry beam.

Abstract: A robotic arm assembly is provided comprising a driving mechanism including a rotor which is rotatable relative to a stator. The rotor is coaxially rotatable about a columnar shaft having a substantially hollow central longitudinal axis. A first arm having proximal and distal pivotal ends is rigidly mounted on the rotor such that the first arm is drivable to rotate by the driving mechanism. A proximal pivotal end of a second arm having proximal and distal pivotal ends is pivotally connected to the proximal pivotal end of the first arm. A first timing pulley is mounted coaxially onto the columnar shaft, and a second timing pulley which is spaced from the first pulley is drivable to rotate together with rotation of the first arm.

Abstract: A robotic arm assembly is provided comprising a driving mechanism including a rotor which is rotatable relative to a stator. The rotor is coaxially rotatable about a columnar shaft having a substantially hollow central longitudinal axis. A first arm having proximal and distal pivotal ends is rigidly mounted on the rotor such that the first arm is drivable to rotate by the driving mechanism. A proximal pivotal end of a second arm having proximal and distal pivotal ends is pivotally connected to the proximal pivotal end of the first arm. A first timing pulley is mounted coaxially onto the columnar shaft, and a second timing pulley which is spaced from the first pulley is drivable to rotate together with rotation of the first arm.

Abstract: A direct drive robotic manipulator is provided which includes a plurality of segments that are rotatably coupled with respect to one another. A plurality of spindles connects the segments for relative rotation therebetween, and a plurality of direct drive assemblies is further coupled to the plurality of spindles. Each direct drive assembly encloses an end of a spindle and comprises a rotor assembly to which the spindle is attached for manipulating the spindle. A positional measurement apparatus may also be included at each direct drive assembly to ascertain an angular disposition of a segment relative to an adjoining segment.

Abstract: A wire bonding apparatus, comprising a bonding tool mounted on a bondhead body which is in turn mounted on a positioning table, is provided for bonding electronic devices. The positioning table has first and second motors coupled to it that are operative to drive the bondhead body to positions along respective first and second orthogonal axes. The bondhead body is connected to the positioning table through a pivot such that the bondhead body is rotatable relative to the positioning table about a third axis which is substantially orthogonal to the first and second axes. Further, a third motor drives the bondhead body to rotate about the third axis.

Abstract: A direct drive robotic manipulator is provided which includes a plurality of segments that are rotatably coupled with respect to one another. A plurality of spindles connects the segments for relative rotation therebetween, and a plurality of direct drive assemblies is further coupled to the plurality of spindles. Each direct drive assembly encloses an end of a spindle and comprises a rotor assembly to which the spindle is attached for manipulating the spindle. A positional measurement apparatus may also be included at each direct drive assembly to ascertain an angular disposition of a segment relative to an adjoining segment.

Abstract: A linear actuator for a motion system is provided with a velocity sensor for monitoring a velocity of an actuation arm that it is driving. The linear actuator comprises a magnetic field, a first coil that is controllably movable within the magnetic field by adjusting a current flowing through the first coil whereby to drive the actuation arm and a second coil that is movable with the first coil and configured such that a voltage is inducible in the second coil that is proportional to its velocity. A controller device is connected to the second coil for receiving feedback indicating the voltage induced in the second coil whereby a velocity of the actuation arm is determinable, wherein the controller device is further connected to the first coil and is operative to adjust the current flowing in the first coil based upon said feedback for controllably driving the actuation arm.

Abstract: A die ejector system and method for removing a die from an adhesive surface. The system includes an ejector tool that is operative to move relative to the die whereby to push the die. The ejector tool may consist of a collet holder and an ejector pin array. A shaft holds the ejector tool and is in turn coupled to a forcer of a linear motor. The forcer is movable relative to a stator of the linear motor flexure bearings coupled to the shaft guide movement of the ejector tool relative to the die. After the die is pushed by the ejector tool, a die pick-up device removes the die from the adhesive surface.

Abstract: A bondhead assembly having a bond body for mounting a bonding tool, a support structure that is configured to be drivable for moving the bondhead assembly to different locations and flexural elements arranged substantially along at least one plane which couple the bond body to the support structure for flexibly supporting the bond body during movement with respect to the support structure. A motor is coupled to the support structure and it is operative to drive the bond body to move relative to the support structure along an axis extending substantially perpendicular to the at least one plane.

Abstract: A gantry system is provided that comprises a gantry beam having a first section and a second section and first and second motors cooperating to drive the respective first and second sections in parallel directions to position the gantry beam along a linear axis. A flexure is connected between the first and second sections about which the second section is deflectable relative to the first section, which is advantageous to reduce any stresses that may be caused in the gantry system when driving the gantry beam.

Abstract: A bondhead assembly having a bond body for mounting a bonding tool, a support structure that is configured to be drivable for moving the bondhead assembly to different locations and flexural elements arranged substantially along at least one plane which couple the bond body to the support structure for flexibly supporting the bond body during movement with respect to the support structure. A motor is coupled to the support structure and it is operative to drive the bond body to move relative to the support structure along an axis extending substantially perpendicular to the at least one plane.

Abstract: A linear actuator for a motion system is provided with a velocity sensor for monitoring a velocity of an actuation arm that it is driving. The linear actuator comprises a magnetic field, a first coil that is controllably movable within the magnetic field by adjusting a current flowing through the first coil whereby to drive the actuation arm and a second coil that is movable with the first coil and configured such that a voltage is inducible in the second coil that is proportional to its velocity. A controller device is connected to the second coil for receiving feedback indicating the voltage induced in the second coil whereby a velocity of the actuation arm is determinable, wherein the controller device is further connected to the first coil and is operative to adjust the current flowing in the first coil based upon said feedback for controllably driving the actuation arm.

Abstract: An apparatus is disclosed for moving an optical component of an opto-mechanical inspection system relative to an object to be inspected using a linear actuator comprising a coil located in a magnetic field created by a magnet assembly. A translation stage is coupled to either of said coil and magnet assembly whereby the translation stage is configured for motion relative to the other of said coil and magnet assembly. Movement of the translation stage is configured along a plane that is substantially perpendicular to a direction of incident light projected from a light source through the optical component onto the object.

Abstract: The position of a working point relative to a working space, such as a working point of a carriage on a gantry beam of an XY positioning table, is determined by measuring at least two sets of displacements. A first set of displacements, of the working point relative to an intermediate component, such as the gantry beam, includes a relatively large displacement (X) in a first linear degree of freedom and relatively small displacements (Y1?, Y2?), in at least two of the five degrees of freedom other than the first. The second set of displacements, of the intermediate component relative to the working space, includes a relatively large displacement (Y1, Y2), in a second linear degree of freedom, and relatively small displacements (X1?, X2?), in at least two of the five degrees of freedom other than the second.

Abstract: The invention provides a die ejector system and method for removing a die from an adhesive surface. The system comprises an ejector tool that is operative to move relative to the die whereby to push the die. The ejector tool may consist of a collet holder and an ejector pin array. A shaft holds the ejector tool and is in turn coupled to a forcer of a linear motor. The forcer is movable relative to a stator of the linear motor. After the die is pushed by the ejector tool, a die pick-up device removes the die from the adhesive surface.

Abstract: The position of a working point relative to a working space, such as a working point of a carriage on a gantry beam of an XY positioning table, is determined by measuring at least two sets of displacements. A first set of displacements, of the working point relative to an intermediate component, such as the gantry beam, includes a relatively large displacement (X) in a first linear degree of freedom and relatively small displacements (Y1′, Y2′), in at least two of the five degrees of freedom other than the first. The second set of displacements, of the intermediate component relative to the working space, includes a relatively large displacement (Y1, Y2), in a second linear degree of freedom, and relatively small displacements (X1′, X2′), in at least two of the five degrees of freedom other than the second.

Abstract: The invention provides an apparatus and method for clamping an object. The apparatus comprises a clamping mechanism and an actuation system to actuate clamping and de-clamping of the clamping mechanism, wherein the actuation system comprises two actuator devices which are operatively coupled whereby to provide an actuation force to the clamping mechanism. Preferably, the actuator devices comprises a variable reluctance actuator and a linear induction actuator coupled together and adapted to cooperate to provide the actuation force to the clamping mechanism.

Abstract: The invention provides an apparatus and method for clamping an object. The apparatus comprises a clamping mechanism and an actuation system to actuate clamping and de-clamping of the clamping mechanism, wherein the actuation system comprises two actuator devices which are operatively coupled whereby to provide an actuation force to the clamping mechanism. Preferably, the actuator devices comprises a variable reluctance actuator and a linear induction actuator coupled together and adapted to cooperate to provide the actuation force to the clamping mechanism.