Abstract: A device for measuring a force applied to a component when the component is being bonded to a component carrier, or when the component is being encapsulated includes a deformable portion and a contacting stem connected to the deformable portion. The deformable portion is configured to incorporate a sensor for detecting a degree of deformation of the deformable portion caused by application of the force in order to measure the force. In use, the contacting stem is positionable to contact the component or the component carrier so that the deformable portion is deformed when the force is applied to the component. One or more such devices may be included in a sintering or encapsulation apparatus for measuring the said force.

Abstract: A substrate cleaning apparatus for cleaning debris from a substrate has a first air jet nozzle defining a first air jet aperture configured to provide a first air jet, a second air jet nozzle defining a second air jet aperture configured to provide a second air jet, and a vacuum nozzle defining a vacuum aperture positioned between the first air jet nozzle and the second air jet nozzle. The vacuum aperture further comprises lobe apertures radially extending transversely to a first axis extending between the first air jet nozzle and the second air jet nozzle.

Abstract: An apparatus for moving an optical element in an opto-mechanical system, includes at least one circularly symmetric flexure surrounding the optical element, and a device for moving the optical element along an axis perpendicular to and extending through the center of the flexure. A number of flexures may be provided in a stack with spacers therebetween, and the optical element may be mounted in a tubular member supported by two spaced apart stacks. Structure is also provided for damping end of movement vibrations.

Abstract: There is disclosed apparatus for moving an optical element in an opto-mechanical system, comprising at least one circularly symmetric flexure surrounding said optical element, and means for moving said optical element along an axis perpendicular to and extending through the centre of said at least one flexure. A number of flexures may be provided in a stack with spacers therebetween, and the optical element may be mounted in a tubular member support by two paced apart stacks. Means are also provided for damping end of movement vibrations.